FORMATION AND PROPERTIES OF POROUS SILICON LAYER ON HEAVILY DOPED n-Si

Rui Bao JIA Shi Xun WANG Guo Xheng LI

引用本文: Rui Bao JIA,  Shi Xun WANG,  Guo Xheng LI. FORMATION AND PROPERTIES OF POROUS SILICON LAYER ON HEAVILY DOPED n-Si[J]. Chinese Chemical Letters, 1993, 4(7): 657-658. shu
Citation:  Rui Bao JIA,  Shi Xun WANG,  Guo Xheng LI. FORMATION AND PROPERTIES OF POROUS SILICON LAYER ON HEAVILY DOPED n-Si[J]. Chinese Chemical Letters, 1993, 4(7): 657-658. shu

FORMATION AND PROPERTIES OF POROUS SILICON LAYER ON HEAVILY DOPED n-Si

  • 基金项目:

    This project is supported by National Natural Science Foundation of China

摘要: The anodic voltammetric curves of heavily doped n-Si in HF solution, on which three different regions have emerged, and were plotted, A porous silicon layer with fine morphology was formed in linear region.

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  • 收稿日期:  1993-01-03
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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