引用本文:
蔡锴, 曹传宝, 酒金婷, 傅强, 汪浩, 朱鹤孙. DMF溶液中导电玻璃上沉积类金刚石薄膜[J]. 应用化学,
1999, 16(4): 80-82.
Citation: Cai Kai, Cao Chuanbao, Jiu Jinting, Fu Qiang, Wang Hao, Zhu Hesun. DLC Films Deposited on Conductive Glass in DMF Solution[J]. Chinese Journal of Applied Chemistry, 1999, 16(4): 80-82.
Citation: Cai Kai, Cao Chuanbao, Jiu Jinting, Fu Qiang, Wang Hao, Zhu Hesun. DLC Films Deposited on Conductive Glass in DMF Solution[J]. Chinese Journal of Applied Chemistry, 1999, 16(4): 80-82.
DMF溶液中导电玻璃上沉积类金刚石薄膜
摘要:
液相法制备类金刚石膜设备简单,操作容易,能大面积成膜,越来越受到研究者们的关注.Namba[1]以乙醇为介质,在1200V电压70℃以下沉积膜,得到了类金刚石膜;Suzuki等[2]以水-乙二醇溶液为介质制膜,只得到了石墨相的碳膜;以乙醇的水溶液为介质利用电解热沉积膜,得到了玻璃碳和石墨碳,同时阴极钨发生碳化有WC和W2C生成[3];Novikov等[4]在乙炔的液氨溶液中沉积膜,Raman谱表明他们得到了类金刚石(DLC)膜;Kwiatek等[5]重复了Namba的实验,证明沉积膜主要为非晶态碳膜,并发现在高电压下,石墨电极上的某些金属杂质(如Na、Mg、K、Ca、Ni、Zn)也会沉积到阴极上,他们认为这些金属杂质的沉积对非晶态碳膜的生成起到了催化作用.我们以分析纯的甲醇为介质,在低于60℃的温度下以Si(100)为基底沉积膜,Raman谱表明该膜为DLC膜,具有一定的耐化学腐蚀能力,电阻率达到107Ω·cm,显微硬度在12~19.5GPa[6~8].本文选择DMF(N,N-二甲基甲酰胺)溶液为源物质,采用脉冲调制直流电源,以导电玻璃片为基底采用电化学方法沉积类金刚石薄膜.
English
DLC Films Deposited on Conductive Glass in DMF Solution
Abstract:
The hydrogenated diamond-like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse-modulated source. The X-ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330~2000 nm and electrical resistivity of 1010Ω·cm.
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Key words:
- diamond-like carbon film
- / formation
- / liquid phase deposition
- / spectra characterization
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