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Citation: FENG Zong-Cai, ZHAO Ling, WANG Yue-Chuan, DU Chun-Lei. Resists from Hyperbranched Polyesters for Micro-optics[J]. Chinese Journal of Applied Chemistry, ;2006, 23(7): 762-765. shu

Resists from Hyperbranched Polyesters for Micro-optics

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a Department of Chemistry, Zhanjiang Normal College, Zhanjiang 524048;
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b State Key Laboratory of Polymer Materials and Engineering, Sichuan University, Chengdu 610065;
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c State Key Laboratory of Optical Technology for Micro-Fabrication, Opt-Electronics Institutc, Chinese Academy of Sciences, Chengdu

Corresponding author: WANG Yue-Chuan,
Received Date: 24 July 2005
Available Online: 24 January 2006
Fund Project:

Three-component photoresists were prepared from hyperbranched polyester,multifunctional acrylate monomer and photoinitiator.The hyperbranched resin had -COOH,-OH and methacryloxy groups at their chain ends.The dried resist on glass substrate showed an H~HB pencil hardness.A high sensitivity with E₀~5.5×10^-3 J/cm² and a high contrast with γ~8 were obtained for the resist exposed with a mixed UV light and developed with TMAH aqueous solution.Sensitivity and contrast upon UV exposure were tunable by development solution and the amount of photoinitiator.The resist exhibited a unique linear relationship between exposure energy and etching depth.This property provides a controlling of surface profile of micro optical elements fabricated with photoresists.Microlens arrays(200 μm×200 μm) were prepared from these photoresists with a moving-mask.
- hyperbranched polyester,
- photoresist,
- microlens array
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