Citation: HAO Pei-Pei, CHEN Chang-Long, WEI Yu-Ling, MU Xiao-Hui. Tin Oxide Thin Films：Synthesis and Room Temperature Gas Sensing Properties[J]. Chinese Journal of Inorganic Chemistry, ;2014, (2): 451-458. doi: 10.11862/CJIC.2014.046 shu

Tin Oxide Thin Films：Synthesis and Room Temperature Gas Sensing Properties

1.
1 School of Chemistry and Chemical Engineering, University of Jinan, Jinan 250022, China;

Corresponding author: CHEN Chang-Long,
Received Date: 19 July 2013
Available Online: 15 October 2013
Fund Project:

Dense tin oxide films were solvothermally grown from the tin oxide seed films fabricated on glass substrates by sol-gel technique. The morphology and crystal structure of the tin oxide films were characterized by using scanning electron microscopy and X-ray diffraction techniques. The results reveal that the films are composed of cassiterite-type tin oxide crystals with size of 7~10 nm. The film quality can be improved significantly when the sodium dodecylbenzenesulfonate is used as the surfactant during the solvothermal reaction. The gas sensor, which is directly connected tin oxide films to the test circuits by using tweezers with special gripping surfaces, exhibits good sensing performance to nitrogen dioxide gas under mild testing conditions, i.e. room temperature, ambient pressure, and dry air background. The sensor can achieve a detection limit of 0.5 μL·L^-1.
- thin films;X-ray diffraction;semiconductors;gas sensor
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沈阳化工大学材料科学与工程学院沈阳 110142