Citation: Wei Chunrong, Wang Fei, Pei Weihua, Liu Zhiduo, Mao Xurui, Zhao Hongze, Wang Sikai, Wang Yijun, Yang Xiaowei, Liu Yuanyuan, Zhao Shanshan, Gui Qiang, Chen Hongda. Light-Induced Noise Reduction of Lightly Doped Silicon-based Neural Electrode[J]. Acta Physico-Chimica Sinica, ;2020, 36(12): 200503. doi: 10.3866/PKU.WHXB202005033 shu

Light-Induced Noise Reduction of Lightly Doped Silicon-based Neural Electrode

Wei Chunrong ^1,2,4 ,
Wang Fei ^1,2,4 ,
Pei Weihua ^1,2,4,, ,
Liu Zhiduo ^1,2,4 ,
Mao Xurui ¹ ,
Zhao Hongze ^1,2,4 ,
Wang Sikai ^1,2,4 ,
Wang Yijun ^1,2,4 ,
Yang Xiaowei ^1,2,4 ,
Liu Yuanyuan ^3,4 ,
Zhao Shanshan ⁵ ,
Gui Qiang ^1,2,4 ,
Chen Hongda ^1,2

1.
The State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, P. R. China
2.
CAS Center for Excellence in Brain Science and Intelligence Technology, Beijing 100083, P. R. China
3.
Engineering Research Center for Semiconductor Integrated Technology, Beijing 100083, P. R. China
4.
University of Chinese Academy of Sciences, Beijing 100049, P. R. China
5.
School of Information Technology and Engineering, Tianjin University of Technology and Education, Tianjin 300222, P. R. China

Corresponding author: Pei Weihua, peiwh@semi.ac.cn
Received Date: 12 May 2020
Revised Date: 10 June 2020
Accepted Date: 12 June 2020
Available Online: 15 June 2020
Fund Project: the National Key Technologies Research and Development Program of China 2016YFB0402405the Strategic Priority Research Program of Chinese Academy of Sciences Pilot Project XDB32040200the National Natural Science Foundation of China 61671424The project was supported by the National Key Technologies Research and Development Program of China (2017YFA0205903, 2017YFA0701100, 2016YFB0402405); the National Natural Science Foundation of China (61634006, 61671424); the Strategic Priority Research Program of Chinese Academy of Sciences Pilot Project (XDB32030100, XDB32040200); the Key Research Programs of Frontier Sciences, CAS (QYZDY-SSW-JSC004)the National Key Technologies Research and Development Program of China 2017YFA0205903the Key Research Programs of Frontier Sciences, CAS QYZDY-SSW-JSC004the National Key Technologies Research and Development Program of China 2017YFA0701100the Strategic Priority Research Program of Chinese Academy of Sciences Pilot Project XDB32030100the National Natural Science Foundation of China 61634006

Silicon-based neural probes are practical tools for recording neural cell firing. A single silicon-based needle with a width of only 70 μm, prepared using the standard complementary metal-oxide-semiconductor (CMOS) process technology, can contain thousands of electrode-recording sites. Optogenetics has made control over neuronal activity more precise. By recording the electrical activity of neurons stimulated by light, more information about brain activity can be recorded and analyzed. When yellow light or blue light is used to stimulate neurons, the photon energy is greater than the forbidden bandwidth of the silicon substrate, and the valence-band electrons are excited to the conduction band, generating electron-hole pairs. The photoinduced carrier in the silicon substrate severely disrupts the probe's signal-to-noise ratio. Decreasing the disturbance caused by light is a pragmatic way to execute recording and stimulating simultaneously. The traditional noise reduction method involves using heavily doped silicon as the substrate, reducing the carrier life by increasing the impurity concentration, and then reducing the noise of the silicon electrode under illumination. However, the heavily doped silicon substrate has more lattice defects than its lightly doped counterparts, which makes the silicon electrode fragile, and this method is not compatible with the standard CMOS process technology. On analyzing the photoinduced noise mechanism of manufacturing electrodes on lightly doped silicon substrates, we found that the inhomogeneous distribution of carriers generated by light excitation polarizes lightly doped silicon substrates. The potential caused by photoinduced polarization will affect the electrodes fabricated on it. Metalizing and grounding the lightly doped silicon substrate will effectively decrease the polarization potential. On using this method, the noise amplitude caused by the illumination can drop to 0.87% of the original value. To ensure an appropriate firing rate of neurons, the photo-stimulation frequency was chosen to be 20 Hz. Under the illumination of 1 mW·mm^-2, the background noise of the electrode could be controlled below 45 μV, which meets the needs for general optogenetics applications. Modification of the lightly doped silicon substrate will meet the requirements of the neural electrode for optogenetics applications. Unlike the traditional method of reducing light-induced noise by heavily doping the entire substrate, the noise reduction method of lightly doped silicon substrate is compatible with the standard CMOS process technology. It provides a noise cancellation method for the preparation of silicon-based neural microelectrodes with dense recording sites and high channel count using standard CMOS processes.
- Light-induced noise,
- Photoinduced carrier,
- Optogenetics,
- Lightly doped,
- Silicon-based neural probe
1. [1]
  Jun, J. J.; Steinmetz, N. A.; Siegle, J. H.; Denman, D. J.; Bauza, M.; Barbarits, B.; Lee, A. K.; Anastassiou, C. A.; Andrei, A.; Aydin, C.; et al. Nature 2017, 551 (7679), 232. doi: 10.1038/nature24636 doi: 10.1038/nature24636
2. [2]
  Najafi, K.; Ji, J.; Wise, K. D. IEEE Trans. Biomed. Eng. 1990, 37 (1), 1. doi: 10.1109/10.43605 doi: 10.1109/10.43605
3. [3]
  Aldaoud, A.; Soto-Breceda, A.; Tong, W.; Conductier, G.; Tonta, M. A.; Coleman, H. A.; Parkington, H. C.; Clarke, I.; Redoute, J. M.; Garrett, D. J.; et al. Sens. Actuators A-Phys. 2018, 271, 201. doi: 10.1016/j.sna.2017.12.051 doi: 10.1016/j.sna.2017.12.051
4. [4]
  McGregor, J. E.; Godat, T.; Dhakal, K. R.; Parkins, K.; Strazzeri, J. M.; Bateman, B. A.; Fischer, W. S.; Williams, D. R.; Merigan, W. H. Nat. Commun. 2020, 11 (1), 1703. doi: 10.1038/s41467-020-15317-6 doi: 10.1038/s41467-020-15317-6
5. [5]
  Tung, J. K.; Berglund, K.; Gross, R. E. Brain Stimul. 2016, 9 (6), 801. doi: 10.1016/j.brs.2016.06.055 doi: 10.1016/j.brs.2016.06.055
6. [6]
  Royer, S.; Zemelman, B. V.; Barbic, M.; Losonczy, A.; Buzsaki, G.; Magee, J. C. Eur. J. Neurosci. 2010, 31 (12), 2279. doi: 10.1111/j.1460-9568.2010.07250.x doi: 10.1111/j.1460-9568.2010.07250.x
7. [7]
  Wu, F.; Stark, E.; Ku, P. C.; Wise, K. D.; Buzsáki, G.; Yoon, E. Neuron 2015, 88 (6), 1136. doi: 10.1016/j.neuron.2015.10.032 doi: 10.1016/j.neuron.2015.10.032
8. [8]
  Bai, Q.; Wise, K. D.; Anderson, D. J. IEEE Trans. Biomed. Eng. 2000, 47 (3), 281. doi: 10.1109/10.827288 doi: 10.1109/10.827288
9. [9]
  Scholvin, J.; Kinney, J. P.; Bernstein, J. G.; Moore-Kochlacs, C.; Kopell, N.; Fonstad, C. G.; Boyden, E. S. IEEE Trans. Biomed. Eng. 2016, 63 (1), 120. doi: 10.1109/TBME.2015.2406113 doi: 10.1109/TBME.2015.2406113
10. [10]
  Law, M. E.; Solley, E.; Liang, M.; Burk, D. E. IEEE Electron Device Lett. 1991, 12 (8), 401. doi: 10.1109/55.119145 doi: 10.1109/55.119145
11. [11]
  Connolly, A. T.; Vetter, R. J.; Hetke, J. F.; Teplitzky, B. A.; Kipke, D. R.; Pellinen, D. S.; Anderson, D. J.; Baker, K. B.; Vitek, J. L.; Johnson, M. D. IEEE Trans. Biomed. Eng. 2016, 63 (1), 148. doi: 10.1109/TBME.2015.2492921 doi: 10.1109/TBME.2015.2492921
12. [12]
  Blanche, T. J.; Spacek, M. A.; Hetke, J. F.; Swindale, N. V. J. Neurophysiol. 2005, 93 (5), 2987. doi: 10.1152/jn.01023.2004 doi: 10.1152/jn.01023.2004
13. [13]
  Chen, S. Y.; Pei, W. H.; Zhao, H.; Gui, Q.; Tang, R. Y.; Chen, Y. F.; Fang, X. L.; Hong, B.; Gao, X. R.; Chen, H. D. Sci. China Inf. Sci. 2014, 57 (5), 1. doi: 10.1007/s11432-013-4846-1 doi: 10.1007/s11432-013-4846-1
14. [14]
  Chen, S.; Pei, W.; Gui, Q.; Tang, R.; Chen, Y.; Zhao, S.; Wang, H.; Chen, H. Sens. Actuators A-Phys. 2013, 193, 141. doi: 10.1016/j.sna.2013.01.033 doi: 10.1016/j.sna.2013.01.033
15. [15]
  Norlin, P.; Kindlundh, M.; Mouroux, A.; Yoshida, K.; Hofmann, U. G. J. Micromech. Microeng. 2002, 12 (4), 414. doi: 10.1088/0960-1317/12/4/312 doi: 10.1088/0960-1317/12/4/312
16. [16]
  Stark, E.; Roux, L.; Eichler, R.; Senzai, Y.; Royer, S.; Buzsáki, G. Neuron 2014, 83 (2), 467. doi: 10.1016/j.neuron.2014.06.023 doi: 10.1016/j.neuron.2014.06.023
17. [17]
  Ferguson, J. E.; Boldt, C.; Redish, A. D. Sens. Actuators A-Phys. 2009, 156 (2), 388. doi: 10.1016/j.sna.2009.10.001 doi: 10.1016/j.sna.2009.10.001
1. [1]
  Bing Niu , Honggao Huang , Liwei Luo , Li Zhang , Jianbo Tan . Coating colloidal particles with a well-defined polymer layer by surface-initiated photoinduced polymerization-induced self-assembly and the subsequent seeded polymerization. Chinese Chemical Letters, 2025, 36(2): 110431-. doi: 10.1016/j.cclet.2024.110431
2. [2]
  Zhiyu Yu , Xiang Luo , Cheng Zhang , Xin Lu , Xiaohui Li , Pan Liao , Zhongqiu Liu , Rong Zhang , Shengtao Wang , Zhiqiang Yu , Guochao Liao . Mitochondria-targeted carrier-free nanoparticles based on dihydroartemisinin against hepatocellular carcinoma. Chinese Chemical Letters, 2024, 35(10): 109519-. doi: 10.1016/j.cclet.2024.109519
3. [3]
  Tong Tong , Lezong Chen , Siying Wu , Zhong Cao , Yuanbin Song , Jun Wu . Establishment of a leucine-based poly(ester amide)s library with self-anticancer effect as nano-drug carrier for colorectal cancer treatment. Chinese Chemical Letters, 2024, 35(12): 109689-. doi: 10.1016/j.cclet.2024.109689
4. [4]
  Chenghao Ge , Peng Wang , Pei Yuan , Tai Wu , Rongjun Zhao , Rong Huang , Lin Xie , Yong Hua . Tuning hot carrier transfer dynamics by perovskite surface modification. Chinese Chemical Letters, 2024, 35(10): 109352-. doi: 10.1016/j.cclet.2023.109352
5. [5]
  Haibin Yang , Duowen Ma , Yang Li , Qinghe Zhao , Feng Pan , Shisheng Zheng , Zirui Lou . Mo doped Ru-based cluster to promote alkaline hydrogen evolution with ultra-low Ru loading. Chinese Journal of Structural Chemistry, 2023, 42(11): 100031-100031. doi: 10.1016/j.cjsc.2023.100031
6. [6]
  Mengmeng Ao , Jian Wei , Chuan-Shu He , Heng Zhang , Zhaokun Xiong , Yonghui Song , Bo Lai . Insight into the activation of peroxymonosulfate by N-doped copper-based carbon for efficient degradation of organic pollutants: Synergy of nonradicals. Chinese Chemical Letters, 2025, 36(1): 109882-. doi: 10.1016/j.cclet.2024.109882
7. [7]
  Yan Wang , Jiaqi Zhang , Xiaofeng Wu , Sibo Wang , Masakazu Anpo , Yuanxing Fang . Elucidating oxygen evolution and reduction mechanisms in nitrogen-doped carbon-based photocatalysts. Chinese Chemical Letters, 2025, 36(2): 110439-. doi: 10.1016/j.cclet.2024.110439
8. [8]
  Hangwen Zheng , Ziqian Wang , HuiJie Zhang , Jing Lei , Rihui Li , Jian Yang , Haiyan Wang . Synthesis and applications of B, N co-doped carbons for zinc-based energy storage devices. Chinese Chemical Letters, 2025, 36(3): 110245-. doi: 10.1016/j.cclet.2024.110245
9. [9]
  Guanyang Zeng , Xingqiang Liu , Liangqiao Wu , Zijie Meng , Debin Zeng , Changlin Yu . Novel visible-light-driven I- doped Bi2O2CO3 nano-sheets fabricated via an ion exchange route for dye and phenol removal. Chinese Journal of Structural Chemistry, 2024, 43(12): 100462-100462. doi: 10.1016/j.cjsc.2024.100462
10. [10]
  Jing-Qi Tao , Shuai Liu , Tian-Yu Zhang , Hong Xin , Xu Yang , Xin-Hua Duan , Li-Na Guo . Photoinduced copper-catalyzed alkoxyl radical-triggered ring-expansion/aminocarbonylation cascade. Chinese Chemical Letters, 2024, 35(6): 109263-. doi: 10.1016/j.cclet.2023.109263
11. [11]
  Changlin Su , Wensheng Cai , Xueguang Shao . Water as a probe for the temperature-induced self-assembly transition of an amphiphilic copolymer. Chinese Chemical Letters, 2025, 36(4): 110095-. doi: 10.1016/j.cclet.2024.110095
12. [12]
  Peng Wang , Daijie Deng , Suqin Wu , Li Xu . Cobalt-based deep eutectic solvent modified nitrogen-doped carbon catalyst for boosting oxygen reduction reaction in zinc-air batteries. Chinese Journal of Structural Chemistry, 2024, 43(1): 100199-100199. doi: 10.1016/j.cjsc.2023.100199
13. [13]
  Yi Liu , Zhe-Hao Wang , Guan-Hua Xue , Lin Chen , Li-Hua Yuan , Yi-Wen Li , Da-Gang Yu , Jian-Heng Ye . Photocatalytic dicarboxylation of strained C–C bonds with CO₂ via consecutive visible-light-induced electron transfer. Chinese Chemical Letters, 2024, 35(6): 109138-. doi: 10.1016/j.cclet.2023.109138
14. [14]
  Xiao-Ming Chen , Lianhui Song , Jun Pan , Fei Zeng , Yi Xie , Wei Wei , Dong Yi . Visible-light-induced four-component difunctionalization of alkenes to construct phosphorodithioate-containing quinoxalin-2(1H)-ones. Chinese Chemical Letters, 2024, 35(11): 110112-. doi: 10.1016/j.cclet.2024.110112
15. [15]
  Huaixiang Yang , Miao-Miao Li , Aijun Zhang , Jiefei Guo , Yongqi Yu , Wei Ding . Visible-light-induced photocatalyst- and metal-free radical phosphinoyloximation of alkenes with tert-butyl nitrite as bifunctional reagent. Chinese Chemical Letters, 2025, 36(3): 110425-. doi: 10.1016/j.cclet.2024.110425
16. [16]
  Jianhui Yin , Wenjing Huang , Changyong Guo , Chao Liu , Fei Gao , Honggang Hu . Tryptophan-specific peptide modification through metal-free photoinduced N-H alkylation employing N-aryl glycines. Chinese Chemical Letters, 2024, 35(6): 109244-. doi: 10.1016/j.cclet.2023.109244
17. [17]
  Guoju Guo , Xufeng Li , Jie Ma , Yongjia Shi , Jian Lv , Daoshan Yang . Photocatalyst/metal-free sequential C–N/C–S bond formation: Synthesis of S-arylisothioureas via photoinduced EDA complex activation. Chinese Chemical Letters, 2024, 35(11): 110024-. doi: 10.1016/j.cclet.2024.110024
18. [18]
  Chaoqun Ma , Yuebo Wang , Ning Han , Rongzhen Zhang , Hui Liu , Xiaofeng Sun , Lingbao Xing . Carbon dot-based artificial light-harvesting systems with sequential energy transfer and white light emission for photocatalysis. Chinese Chemical Letters, 2024, 35(4): 108632-. doi: 10.1016/j.cclet.2023.108632
19. [19]
  Wengao Zeng , Yuchen Dong , Xiaoyuan Ye , Ziying Zhang , Tuo Zhang , Xiangjiu Guan , Liejin Guo . Crystalline carbon nitride with in-plane built-in electric field accelerates carrier separation for excellent photocatalytic hydrogen evolution. Chinese Chemical Letters, 2024, 35(4): 109252-. doi: 10.1016/j.cclet.2023.109252
20. [20]
  Rongjun Zhao , Tai Wu , Yong Hua , Yude Wang . Improving performance of perovskite solar cells enabled by defects passivation and carrier transport dynamics regulation via organic additive. Chinese Chemical Letters, 2025, 36(2): 109587-. doi: 10.1016/j.cclet.2024.109587

Get Citation

PDF

XML

Metrics

PDF Downloads(9)
Abstract views(927)
HTML views(145)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142