Citation:
LIU Lin, LI Zhi-Sheng, HU Hui-Dong, SONG Wei-Li. Insight into Macroscopic Metal-Assisted Chemical Etching for Silicon Nanowires[J]. Acta Physico-Chimica Sinica,
;2016, 32(4): 1019-1028.
doi:
10.3866/PKU.WHXB201602183
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To understand the principles of the fabrication of nanowire arrays using macroscopic metal-assisted chemical etching (MACE), Si nanowires (SiNWs) are synthesized using Ag-coated Si substrates and Pt electrodes by the macroscopic MACE. Analysis of the SiNWmorphology coupled with the corresponding current density in the MACE process is applied to systematically investigate the effects of the electrical connection, Ag coating, etching conditions, Si substrates, and light irradiation on the formation of SiNWs. It is found that there is a certain relationship between the current density and the SiNWlength. Amode is proposed to fundamentally understand the mechanisms of the preparation of SiNWs using MACE. Associated opportunities are also discussed.
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Keywords:
- Semiconductor,
- Microstructure,
- Electrochemistry,
- Silicon nanowire,
- Metal etching
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[1]
(1) Brodoceanu, D.; Alhmoud, H. Z.; Elnathan, R.; Delalat, B.; Voelcker, N. H.; Kraus, T. Nanotechnology 2016, 27, 075301. doi: 10.1088/0957-4484/27/7/075301
-
[2]
(2) Cao, M. S.; Yang, J.; Song, W. L.; Zhang, D. Q.;Wen, B.; Jin, H. B.; Hou, Z. L.; Yuan, J. ACS Appl. Mater. Interfaces 2012, 4, 6948. doi: 10.1021/am3021069
-
[3]
(3) Cao, M. S.; Song, W. L.; Hou, Z. L.; Yang, J. Carbon 2010, 48, 788. doi: 10.1016/j.carbon.2009.10.028
-
[4]
(4) Cao, M. S.; Shi, X. L.; Fang, X. Y.; Jin, H. B.; Hou, Z. L.; Zhou, W.; Chen, Y. J. Appl. Phys. Lett. 2007, 91, 203110. doi: 10.1063/1.2803764
-
[5]
(5) Zhou, X.; Sun, M. Q.;Wang, G. C. Acta Phys. -Chim. Sin. 2016, 32, 975. [周晓, 孙敏强, 王庚超. 物理化学学报, 2016, 32, 975.] doi: 10.3866/PKU.WHXB201601281
-
[6]
(6) Wang, J. D.; Peng, T. J.; Xian, H. Y.; Sun, H. J. Acta Phys. -Chim. Sin. 2015, 31, 90. [汪建德, 彭同江, 鲜海洋, 孙红娟. 物理化学学报, 2015, 31, 90.] doi: 10.3866/PKU.WHXB201411202
-
[7]
(7) Hu, R. J.;Wang, J.; Zhu, H. C. Acta Phys. -Chim. Sin. 2015, 31, 1997. [胡瑞金, 王兢, 朱慧超. 物理化学学报, 2015, 31, 1997.] doi: 10.3866/PKU.WHXB201508241
-
[8]
(8) Wagner, R. S.; Ellis, W. C. Appl. Phys. Lett. 1964, 4, 89. doi: 10.1063/1.1753975
-
[9]
(9) Lee, G.;Woo, Y. S.; Yang, J. E.; Lee, D. H.; Kim, C. J.; Jo, M. H. Angew. Chem. Int. Edit. 2009, 48, 7366. doi: 10.1002/anie.v48:40
-
[10]
(10) Kolasinski, K.W. Curr. Opin. Solid State Mater. Sci. 2005, 9, 73. doi: 10.1016/j.cossms.2006.03.004
-
[11]
(11) Lehmann, V.; Stengl, R.; Luigart, A. Mater. Sci. Eng. B 2000, 69, 11. doi: 10.1016/S0921-5107(99)00286-X
-
[12]
(12) Peng, K. Q.;Wu, Y.; Fang, H.; Zhong, X. Y.; Xu, Y.; Zhu, J. Angew. Chem. Int. Edit. 2005, 44, 2737. doi: 10.1002/anie.200462995
-
[13]
(13) Peng, K. Q.; Zhu, J. Electrochim. Acta 2004, 49, 2563. doi: 10.1016/j.electacta.2004.02.009
-
[14]
(14) Liu, L.; Peng, K. Q.; Hu, Y.;Wu, X. L.; Lee, S. T. Adv. Mater. 2014, 26, 1410. doi: 10.1002/adma.201304327
-
[15]
(15) Huang, Z. P.; Geyer, N.;Werner, P.; Boor, J. D.; Gösele, U. Adv. Mater. 2011, 23, 285. doi: 10.1002/adma.v23.2
-
[16]
(16) Hochbaum, A. I.; Chen, R.; Delgado, R. D.; Liang, W. J.; Garnett, E. C.; Najarian, M.; Majumdar, A.; Yang, P. D. Nature 2008, 451, 163. doi: 10.1038/nature06381
-
[17]
(17) Brammer, K. S.; Choi, C.; Oh, S.; Cobb, C. J.; Connelly, L. S.; Loya, M.; Kong, S. D.; Jin, S. Nano Lett. 2009, 9, 3570. doi: 10.1021/nl901769m
-
[18]
(18) Liu, L.;Wang, Y. T. Acta Phys. Sin. 2015, 64, 148201. doi: 10.7498/aps.64.148201
-
[19]
(19) Liu, L. Sci. China Tech. Sci. 2015, 58, 362. doi: 10.1007/ s11431-014-5740-9
-
[20]
(20) Tsujino, K.; Matsumura, M. Adv. Mater. 2005, 17, 1045. doi: 10.1002/adma.200401681
-
[21]
(21) Liu, L. J. Mater. Chem. C 2014, 2, 9631. doi: 10.1039/C4TC01431F
-
[22]
(22) Ashruf, C. M. A.; French, P. J.; Bressers, P. M. M. C.; Kelly, J. J. Sens. Actuators 1999, 74, 118. doi: 10.1016/S0924-4247(98)00340-9
-
[23]
(23) Ashruf, C. M. A.; French, P. J.; Sarro, P. M.; Kazinczi, R.; Xia, X. H.; Kelly, J. J. J. Micromech. Microeng. 2000, 10, 505. doi: 10.1088/0960-1317/10/4/304
-
[24]
(24) Xia, X. H.; Ashruf, C. M. A.; French, P. J.; Kelly, J. J. Chem. Mater. 2000, 12, 1671. doi: 10.1021/cm9912066
-
[25]
(25) Kelly, J. J.; Xia, X. H.; Ashruf, C. M. A.; French, P. J. IEEE Sens. J. 2001, 1, 127. doi: 10.1109/JSEN.2001.936930
-
[26]
(26) Song, Y. Y.; Gao, Z. D.; Kelly, J. J.; Xia, X. H. Electrochem. Solid-State Lett. 2005, 8, C148. doi: 10.1149/1.2033616
-
[27]
(27) Huang, Z. P.; Geyer, N.; Liu, L.F.; Li, M. Y.; Zhong, P. Nanotechnology 2010, 21, 465301. doi: 10.1088/0957-4484/21/46/465301
-
[28]
(28) Chourou, M. L.; Fukami, K.; Sakka, T.; Virtanen, S.; Ogata, Y. H. Electrochim. Acta 2010, 55, 903. doi: 10.1016/j.electacta.2009.09.048
-
[29]
(29) Kim, J.; Rhu, H.; Lee, W. J. Mater. Chem. 2011, 15889. doi: 10.1039/C1JM13831F
-
[30]
(30) Weisse, J. M.; Lee, C. H.; Kim, D. R.; Cai, L.; Rao, P. M.; Zheng, X. Nano Lett. 2013, 13, 4362. doi: 10.1021/nl4021705
-
[31]
(31) Lai, C. Q.; Zheng, W.; Choi, W. K.; Thompson, C. V. Nanoscale 2015, 7, 11123. doi: 10.1039/C5NR01916H
-
[32]
(32) Huang, Z. P.; Zhang, X. X.; Reiche, M.; Liu, L. F.; Lee, W.; Shimizu, T.; Senz, S.; Gösele, U. Nano Lett. 2008, 8, 3046. doi: 10.1021/nl802324y
-
[33]
(33) Huang, Z. P.; Shimizu, T.; Senz, S.; Zhang, Z.; Zhang, X. X.; Lee, W.; Geyer, N.; Gösele, U. Nano Lett. 2009, 9, 2519. doi: 10.1021/nl803558n
-
[34]
(34) VanDjlk, H. J. A.; de Jonge, J. J. Electrochem. Soc. 1970, 177, 553. doi: 10.1149/1.2407568
-
[35]
(35) Theunissen, M. J. J.; Appels, J. A.; Verkuylen, W. H. C.G. J. Electrochem. Soc. 1970, 117, 959. doi: 10.1149/1.2407698
-
[36]
(36) Meek, R. L. J. Electrochem. Soc. 1971, 118, 437. doi: 10.1149/1.2408076 doi: 10.1149/1.2408076
-
[37]
(37) Föll, H. Appl. Phys. A 1991, 53, 8. doi: 10.1007/BF00323428
-
[38]
(38) Lehmann, V. J. Electrochem. Soc.1993, 140, 2836. doi: 10.1149/1.2220919
-
[39]
(39) Bertagna, V.; Plougonven, C.; Rouelle, F.; Chemla, M. J. Electrochem. Soc. 1996, 143, 3532. doi: 10.1149/1.1837249
-
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