Citation: LIU Qing-Bin, YU Cui, HE Ze-Zhao, WANG Jing-Jing, LI Jia, LU Wei-Li, FENG Zhi-Hong. Epitaxial Graphene on Sapphire Substrate by Chemical Vapor Deposition[J]. Acta Physico-Chimica Sinica, ;2016, 32(3): 787-792. doi: 10.3866/PKU.WHXB201512183 shu

Epitaxial Graphene on Sapphire Substrate by Chemical Vapor Deposition

1.
National Key Laboratory of Application Specific Integrated Circuit, Hebei Semiconductor Research Institute, Shijiazhuang 050051, P. R. China

Corresponding author: FENG Zhi-Hong,
Received Date: 28 September 2015
Available Online: 14 December 2015
Fund Project: 国家自然科学基金(61306006)资助项目 (61306006)

Epitaxial graphene by chemical vapor deposition (CVD) is one of the main methods to fabricate high-quality wafer-scale graphene materials. However, CVD-grown graphene on metal substrates has some disadvantages, such as the need for a transfer process and carbon atoms dissolved into the metal substrate. In this work, we evaluate sapphire substrates to overcome those disadvantages. The morphology and crystal quality of the samples grown at different temperatures were characterized by atomic force microscopy (AFM), optical microscopy (OM), Raman spectroscopy, and a Hall measurement system. To ease the etching process of carbon atoms to the substrate, we adopt a very low carbon concentration of 0.01%. AFM and Raman results show that the surface morphologies of samples grown at lower temperatures were smoother, whereas the quality of samples grown at higher temperatures was better. The sapphire substrate was etched in an H₂ environment, while it was not etched only by carbon source without H₂ environment. Epitaxial graphene with flat surface morphology and good crystal quality was prepared on a c-plane sapphire substrate (diameter: 50 mm) at a growth temperature of 1200 ℃. The carrier mobility is above 1000 cm²·V^-1·s^-1 at room temperature.
- Graphene,
- Sapphire,
- Chemical vapor deposition,
- Growth temperature,
- Etching mechanism
1. [1]
  (1) Novoselov, K. S.; Geim, A. K.; Morozov, S. V.; Jiang, D.; Zhang, Y.; Dubonos, S. V.; Grigorieva, I. V.; Firsov, A. A.Science 2004, 306 (5696), 666. doi: 10.1126/science.1102896
2. [2]
  (2) Geim, A. K.; Novoselov, K. S. Nat. Mater. 2007, 6, 183. doi: 10.1038/nmat1849
3. [3]
  (3) Li, X. S.; Cai, W.W.; An, J.; Kim, S.; Nah, J.; Yang, D. X.; Piner, R.; Velamakanni, A.; Jung, I.; Tutuc, E.; Banerjee, S. K.; Colombo, L.; Ruoff, R. S. Science 2009, 324 (5932), 1312. doi: 10.1126/science.1171245
4. [4]
  (4) Bae, S.; Kim, H.; Lee, Y. B.; Xu, X. F.; Park, J. S.; Zheng, Y.; Balakrishnan, J.; Lei, T.; Kim, H. R.; Song, Y., II.; Kim, Y. J.; Kim, K. S.; Özyilmaz, B.; Ahn, J. H.; Hong, B. H.; Iijima, S.Nat. Nanotechnol. 2010, 5, 574. doi: 10.1038/nnano.2010.132
5. [5]
  (5) Li, X. S.; Cai, W.W.; Colombo, L.; Ruoff, R. S. Nano Lett.2009, 9 (12), 4268. doi: 10.1021/nl902515k
6. [6]
  (6) Bi, H.; Huang, F. Q.; Zhao, W.; Lü, X. J.; Chen, J.; Lin, T. Q.; Wan, D. Y.; Xie, X. M.; Jiang, M. H. Carbon 2012, 50 (8), 2703. doi: 10.1016/j.carbon.2012.02.027
7. [7]
  (7) Hwang, J.; Shields, V. B.; Thomas, C. I.; Shivaraman, S.; Hao, D.; Kim, M.; Woll, A. R.; Kim, M.; Spencer, M. G. J. Cryst. Grow. 2010, 312 (21), 3219. doi: 10.1016/j.jcrysgro.2010.07.046
8. [8]
  (8) Maeda, F.; Hibino, H. Jpn. J. Appl. Phys. 2010, 49 (4), 04DH13. doi: 10.1143/JJAP.49.04DH13
9. [9]
  (9) Fanton, M. A.; Robinson, J. A.; Puls, C.; Liu, Y.; Hollander, M.J.; Weiland, B. E.; LaBella, M.; Trumbull, K.; Kasarda, R.; Howsare, C.; Stitt, J.; Snyder, D.W. ACS Nano 2011, 5 (10), 8062. doi: 10.1021/nn202643t
10. [10]
  (10) Hwang, J.; Kim, M.; Campbell, D.; Alsalman, H. A.; Kwak, J.Y.; Shivaraman, S.; Woll, A. R.; Singh, A. K.; Hennig, R. G.; Gorantla, S.; Rümmeli, M. H.; Spencer, M. G. ACS Nano2013, 7 (1), 385. doi: 10.1021/nn305486x
11. [11]
  (11) Robinson, J. A.; Wetherington, M.; Tedesco, J. L.; Campbell, P.M.; Weng, X.; Stitt, J.; Fanton, M. A.; Frantz, E.; Snyder, D.; VanMil, B. L.; Jernigan, G. G.; Myers-Ward, R. L.; Eddy, C.R., Jr.; Gaskill, D. K. Nano Lett. 2009, 9 (8), 2873. doi: 10.1021/nl901073g
12. [12]
  (12) Wang, G.; Zhang, M.; Zhu, Y.; Ding, G. Q.; Jing, D.; Guo, Q.L.; Liu, S.; Xie, X. M.; Chu, P. K.; Di, Z. F.; Wang, X. Sci. Rep. -UK 2013, 3: 2465. doi: 10.1038/srep02465
13. [13]
  (13) Srivastava, N.; He, G.W.; Feenstra, R. M.; Fisher, P. J. Phys. Rev. B 2010, 82, 235406. doi: 10.1103/PhysRevB.82.235406
14. [14]
  (14) Wang, Y. Y.; Ni, Z. H.; Shen, Z. X.; Wang, H. M.; Wu, Y. H.Appl. Phys. Lett. 2008, 92 (4), 043121. doi: 10.1063/1.2838745
15. [15]
  (15) Canc, L. G.; Takai, K.; Enoki, T.; Endo, M.; Kim, Y. A.; Mizusaki, H.; Jorio, A.; Coelho, L. N.; Magalhaes-Paniago, R.; Pimenta, M. A. Appl. Phys. Lett. 2006, 88 (16), 163106. doi: 10.1063/1.2196057
16. [16]
  (16) Wang, S.; Lara, F. D. S.; Wurstbauer, U.; Wang, L.; Pfeiffer, L.N.; Hone, J.; Garcia, J. M.; Pinczuk, A. Solid State Commun.2014, 189, 15. doi: org/10.1016/j.ssc.2014.03.008
1. [1]
  Zhihuan XU , Qing KANG , Yuzhen LONG , Qian YUAN , Cidong LIU , Xin LI , Genghuai TANG , Yuqing LIAO . Effect of graphene oxide concentration on the electrochemical properties of reduced graphene oxide/ZnS. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1329-1336. doi: 10.11862/CJIC.20230447
2. [2]
  Zhenlin Zhou , Siyuan Chen , Yi Liu , Chengguo Hu , Faqiong Zhao . A New Program of Voltammetry Experiment Teaching Based on Laser-Scribed Graphene Electrode. University Chemistry, 2024, 39(2): 358-370. doi: 10.3866/PKU.DXHX202308049
3. [3]
  Jie XIE , Hongnan XU , Jianfeng LIAO , Ruoyu CHEN , Lin SUN , Zhong JIN . Nitrogen-doped 3D graphene-carbon nanotube network for efficient lithium storage. Chinese Journal of Inorganic Chemistry, 2024, 40(10): 1840-1849. doi: 10.11862/CJIC.20240216
4. [4]
  Yunting Shang , Yue Dai , Jianxin Zhang , Nan Zhu , Yan Su . Something about RGO (Reduced Graphene Oxide). University Chemistry, 2024, 39(9): 273-278. doi: 10.3866/PKU.DXHX202306050
5. [5]
  Jiao CHEN , Yi LI , Yi XIE , Dandan DIAO , Qiang XIAO . Vapor-phase transport of MFI nanosheets for the fabrication of ultrathin b-axis oriented zeolite membranes. Chinese Journal of Inorganic Chemistry, 2024, 40(3): 507-514. doi: 10.11862/CJIC.20230403
6. [6]
  Zhuo WANG , Junshan ZHANG , Shaoyan YANG , Lingyan ZHOU , Yedi LI , Yuanpei LAN . Preparation and photocatalytic performance of CeO₂-reduced graphene oxide by thermal decomposition. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1708-1718. doi: 10.11862/CJIC.20240067
7. [7]
  Zeyu XU , Anlei DANG , Bihua DENG , Xiaoxin ZUO , Yu LU , Ping YANG , Wenzhu YIN . Evaluation of the efficacy of graphene oxide quantum dots as an ovalbumin delivery platform and adjuvant for immune enhancement. Chinese Journal of Inorganic Chemistry, 2024, 40(6): 1065-1078. doi: 10.11862/CJIC.20240099
8. [8]
  Hao BAI , Weizhi JI , Jinyan CHEN , Hongji LI , Mingji LI . Preparation of Cu₂O/Cu-vertical graphene microelectrode and detection of uric acid/electroencephalogram. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1309-1319. doi: 10.11862/CJIC.20240001
9. [9]
  Yan LIU , Jiaxin GUO , Song YANG , Shixian XU , Yanyan YANG , Zhongliang YU , Xiaogang HAO . Exclusionary recovery of phosphate anions with low concentration from wastewater using a CoNi-layered double hydroxide/graphene electronically controlled separation film. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1775-1783. doi: 10.11862/CJIC.20240043
10. [10]
  Zhen Yao , Bing Lin , Youping Tian , Tao Li , Wenhui Zhang , Xiongwei Liu , Wude Yang . Visible-Light-Mediated One-Pot Synthesis of Secondary Amines and Mechanistic Exploration. University Chemistry, 2024, 39(5): 201-208. doi: 10.3866/PKU.DXHX202311033
11. [11]
  Xiaowu Zhang , Pai Liu , Qishen Huang , Shufeng Pang , Zhiming Gao , Yunhong Zhang . Acid-Base Dissociation Equilibrium in Multiphase System: Effect of Gas. University Chemistry, 2024, 39(4): 387-394. doi: 10.3866/PKU.DXHX202310021
12. [12]
  Tingbo Wang , Yao Luo , Bingyan Hu , Ruiyuan Liu , Jing Miao , Huizhe Lu . Quantitative Computational Study on the Claisen Rearrangement Reaction of Allyl Phenyl Ethers: An Introduction to a Computational Chemistry Experiment. University Chemistry, 2024, 39(11): 278-285. doi: 10.12461/PKU.DXHX202403082
13. [13]
  Ronghao Zhao , Yifan Liang , Mengyao Shi , Rongxiu Zhu , Dongju Zhang . Investigation into the Mechanism and Migratory Aptitude of Typical Pinacol Rearrangement Reactions: A Research-Oriented Computational Chemistry Experiment. University Chemistry, 2024, 39(4): 305-313. doi: 10.3866/PKU.DXHX202309101
14. [14]
  Hong LI , Xiaoying DING , Cihang LIU , Jinghan ZHANG , Yanying RAO . Detection of iron and copper ions based on gold nanorod etching colorimetry. Chinese Journal of Inorganic Chemistry, 2024, 40(5): 953-962. doi: 10.11862/CJIC.20230370
15. [15]
  Huan LI , Shengyan WANG , Long Zhang , Yue CAO , Xiaohan YANG , Ziliang WANG , Wenjuan ZHU , Wenlei ZHU , Yang ZHOU . Growth mechanisms and application potentials of magic-size clusters of groups Ⅱ-Ⅵ semiconductors. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1425-1441. doi: 10.11862/CJIC.20240088
16. [16]
  Zunxiang Zeng , Yuling Hu , Yufei Hu , Hua Xiao . Analysis of Plant Essential Oils by Supercritical CO₂Extraction with Gas Chromatography-Mass Spectrometry: An Instrumental Analysis Comprehensive Experiment Teaching Reform. University Chemistry, 2024, 39(3): 274-282. doi: 10.3866/PKU.DXHX202309069
17. [17]
  Xinyu ZENG , Guhua TANG , Jianming OUYANG . Inhibitory effect of Desmodium styracifolium polysaccharides with different content of carboxyl groups on the growth, aggregation and cell adhesion of calcium oxalate crystals. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1563-1576. doi: 10.11862/CJIC.20230374
18. [18]
  Xiaosong PU , Hangkai WU , Taohong LI , Huijuan LI , Shouqing LIU , Yuanbo HUANG , Xuemei LI . Adsorption performance and removal mechanism of Cd(Ⅱ) in water by magnesium modified carbon foam. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1537-1548. doi: 10.11862/CJIC.20240030
19. [19]
  Heng Zhang . Determination of All Rate Constants in the Enzyme Catalyzed Reactions Based on Michaelis-Menten Mechanism. University Chemistry, 2024, 39(4): 395-400. doi: 10.3866/PKU.DXHX202310047
20. [20]
  Rui Gao , Ying Zhou , Yifan Hu , Siyuan Chen , Shouhong Xu , Qianfu Luo , Wenqing Zhang . Design, Synthesis and Performance Experiment of Novel Photoswitchable Hybrid Tetraarylethenes. University Chemistry, 2024, 39(5): 125-133. doi: 10.3866/PKU.DXHX202310050

Get Citation

PDF

XML

Metrics

PDF Downloads(0)
Abstract views(324)
HTML views(13)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142