Citation: CHANG Da-Lei, LI Xiao-Song, ZHAO Tian-Liang, ZHU Ai-Min. Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma[J]. Acta Physico-Chimica Sinica, ;2013, 29(03): 625-630. doi: 10.3866/PKU.WHXB201212271 shu

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma

1.
Laboratory of Plasma Physical Chemistry, Dalian University of Technology, Dalian 116024, Liaoning Province, P. R. China

Received Date: 16 October 2012
Available Online: 27 December 2012
Fund Project: 国家自然科学基金(10835004, 51077009)资助项目 (10835004, 51077009)

Diagnosis of emission spectroscopy on chemical vapor deposition (PCVD) of TiO₂ with atmospheric-pressure radio frequency (RF) plasma was studied. The dependences of relative intensity of atomic oxygen line, Ar excitation temperature, OH rotational and vibrational temperatures were investigated on partial pressures of O₂ and titanium tetraisopropoxide (TTIP) and input power, respectively. The relative intensity of the atomic oxygen line rapidly increased to a maximum and slowly decreased with increasing O₂ partial pressure. OH vibrational temperature gradually increased, whereas Ar excitation temperature and OH rotational temperature showed little change. The relative intensity of the atomic oxygen line decreased, Ar excitation temperature remained constant, and OH vibrational and rotational temperatures increased with increasing TTIP partial pressure. The relative intensity of atomic oxygen line decreased, whereas the Ar excitation temperature and OH vibrational and rotational temperatures increased with increasing input power.
- Atmospheric-pressure radio frequency plasma,
- Dielectric barrier discharge,
- Plasma chemical vapour deposition,
- Diagnosis of optical emission spectrum,
- TiO₂
1. [1]
  
  (1) Parkin, I. P.; Palgrave, R. G. J. Mater. Chem. 2005, 15 (17),1689. doi: 10.1039/b412803f
2. [2]
  (2) Mills, A.; Hill, G.; Crow, M.; Hodgen, S. J. Appl. Electrochem.2005, 35 (7-8), 641. doi: 10.1007/s10800-005-1628-5
3. [3]
  (3) Mcfarland, E.W.; Tang, J. Nature 2003, 421 (6923), 616. doi: 10.1038/nature01316
4. [4]
  (4) Ozer, N.; Lampert, C. M. Sol. Energy Mater. Sol. Cells 1998, 54 (1-4), 147. doi: 10.1016/S0927-0248(98)00065-8
5. [5]
  (5) Wang, R.; Hashimoto, K.; Fujishima, A.; Chikuni, M.; Kojima,E.; Kitamura, A.; Shimohi shi, M.;Watanabe, T. Nature 1997,388 (6641), 431. doi: 10.1038/41233
6. [6]
  (6) Mills, A.; Lehunte, S. J. Photochem. Photobiol. A 1997, 108 (1),1. doi: 10.1016/S1010-6030(97)00118-4
7. [7]
  (7) Xiao, Y. M.;Wu, J. H.; Yue, G. T.; Lin, J. M.; Huang, M. L. ActaPhys. -Chim. Sin. 2012, 28 (3), 578. [肖尧明, 吴季怀, 岳根田, 林建明, 黄妙良. 物理化学学报, 2012, 28 (3), 578.] doi: 10.3866/PKU.WHXB201201032
8. [8]
  (8) Zhang, J. L.; Yan, S. S.;Wu, L. D.; Chen, F. Acta Phys. -Chim.Sin. 2007, 23 (3), 414. [张金龙, 燕姗姗, 吴连弟, 陈锋. 物理化学学报, 2007, 23 (3), 414.] doi: 10.3866/PKU.WHXB20070325
9. [9]
  (9) Di, L. B.; Li, X. S.; Shi, C.; Xu, Y.; Zhao, D. Z.; Zhu, A. M.J. Phys. D: Appl. Phys. 2009, 42 (3), 32001. doi: 10.1088/0022-3727/42/3/032001
10. [10]
  (10) Kment, S.; Kluson, P.; Zabova, H.; Churpita, A.; Chichina, M.;Cada, M.; Gre ra, I.; Krysa, J.; Hubicka, Z. Surf. Coat. Tech.2009, 204 (5), 667. doi: 10.1016/j.surfcoat.2009.09.007
11. [11]
  (11) Hodgkinson, J. L.; Yates, H. M.; Sheel, D.W. Plasma Process.Polym. 2009, 6 (9), 575. doi: 10.1002/ppap.v6:9
12. [12]
  (12) Nie, L. H.; Shi, C.; Xu, Y.;Wu, O. H.; Zhu, A. M. PlasmaProcess. Polym. 2007, 4 (5), 574.
13. [13]
  (13) Zhu, A. M.; Nie, L. H.;Wu, Q. H.; Zhang, X. L.; Yang, X. F.;Xu, Y.; Shi, C. Chem. Vapor. Depos. 2007, 13 (4), 141.
14. [14]
  (14) Zhu, A. M.; Nie, L. H.; Zhang, X. L.; Shi, C.; Song, Z. M.; Xu,Y. Plasma Sci. Technol. 2004, 6 (6), 2546. doi: 10.1088/1009-0630/6/6/006
15. [15]
  (15) Zhang, X. L.; Nie, L. H.; Xu, Y.; Shi, C.; Yang, X. F.; Zhu, A.M. J. Phys. D: Appl. Phys. 2007, 40 (6), 1763. doi: 10.1088/0022-3727/40/6/024
16. [16]
  (16) Chang, D. L.; Li, X. S.; Zhao, T. L.; Yang, J. H.; Zhu, A. M.Chem. Vapor Depos. 2012, 18 (4-6), 121. doi: 10.1002/cvde.v18.4/6
17. [17]
  (17) Li, S. Z.;Wu, Q.; Zhang, J. L.;Wang, D. Z.; Uhm, H. S. ThinSolid Films 2011, 519 (20), 6990. doi: 10.1016/j.tsf.2011.01.222
18. [18]
  (18) Li, S. Z.;Wu, Q.; Yan,W.;Wang, D. Z.; Uhm, H. S. Phys.Plasmas 2011, 18 (10), 103502. doi: 10.1063/1.3643224
19. [19]
  (19) Li, S. Z.;Wu, Q.; Zhang, J. L.;Wang, D. Z.; Uhm, H. S. Phys.Plasmas 2010, 17 (6), 63506. doi: 10.1063/1.3447877
20. [20]
  (20) Uhm, H. S.; Lim, J. P.; Li, S. Z. Appl. Phys. Lett. 2007, 90 (26),261501. doi: 10.1063/1.2747177
21. [21]
  (21) Lim, J. P.; Uhm, H. S.; Li, S. Z. Phys. Plasmas 2007, 14 (9),93504. doi: 10.1063/1.2773705
22. [22]
  (22) Li, S. Z.; Lim, J. P.; Uhm, H. S. Phys. Lett. A 2006, 360 (2), 304.doi: 10.1016/j.physleta.2006.08.036
23. [23]
  (23) Moon, S. Y.; Choe,W.; Kang, B. K. Appl. Phys. Lett. 2004, 84 (2), 188. doi: 10.1063/1.1639135
24. [24]
  (24) Moon, S. Y.; Han, J.W.; Choe,W. Thin Solid Films 2006, 506,355. doi: 10.1016/j.tsf.2005.08.081
25. [25]
  (25) Walkup, R. E.; Saenger, K. L.; Selwyn, G. S. J. Chem. Phys.1986, 84 (5), 2668. doi: 10.1063/1.450339
26. [26]
  (26) Inomata, K.; Koinuma, H.; Oikawa, Y.; Shiraishi, T. Appl. Phys.Lett. 1995, 66 (17), 2188. doi: 10.1063/1.113942
27. [27]
  (27) Knake, N.; Reuter, S.; Niemi, K.; Schulz-Von Der Gathen, V.;Winter, J. J. Phys. D: Appl. Phys. 2008, 41 (19), 194006. doi: 10.1088/0022-3727/41/19/194006
28. [28]
  (28) NIST database. http://www.nist. v.
29. [29]
  (29) lden, D. E.; Bandel, H.W. Phys. Rev. 1966, 149 (1), 58. doi: 10.1103/PhysRev.149.58
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通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO2 System with Atmospheric-Pressure Radio Frequency Plasma

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通讯作者: 陈斌, bchen63@163.com

Diagnosis of Emission Spectra on Chemical Vapor Deposition of TiO₂ System with Atmospheric-Pressure Radio Frequency Plasma