Citation: SUN Wen-Li, XU Jun, LU Wen-Qi. Chemical Structure and Growth Mechanism of a-SixC1-x:H Films Prepared by Plasma Enhanced Magnetron Sputtering[J]. Acta Physico-Chimica Sinica, ;2010, 26(08): 2311-2316. doi: 10.3866/PKU.WHXB20100810 shu

Chemical Structure and Growth Mechanism of a-SixC1-x:H Films Prepared by Plasma Enhanced Magnetron Sputtering

  • Received Date: 18 January 2010
    Available Online: 11 June 2010

    Fund Project: 国家自然科学基金(60576022, 50572012)资助项目 (60576022, 50572012)

  • Hydrogenated amorphous silicon carbide (a-Si1-xCx:H) films were prepared by microwave electron cyclotron resonance (MW-ECR) plasma enhanced unbalance magnetron sputtering with a silicon target and CH4 as Si and C sources, respectively. The influence of CH4 flow rate and the deposition temperature on the chemical structure, stoichiometry, and hardness were investigated by Fourier transform infrared (FT-IR) spectroscopy, X-ray photoelectron spectroscopy (XPS), and nano-indentation. The results indicated that, as the CH4 flow rate increased from 5 to 45 cm3·min-1 (standard state), the amount of Si—CH2 groups and C—H groups increased constantly, but the number of Si—H groups did not change. The atomic concentration of C increases from 28% to 76% while Si decreases from 62% to 19%. The amount of Si—H and C—H groups in the deposited films decreases dramatically while the Si—C bonds and the hardness of the resultant films increase with an increase in deposition temperature at a constant CH4 flow rate. The atomic concentrations of Si and C remain almost constant at about 52% and 43%, respectively. The hardness of the deposited films with a constant CH4 flow rate of 15 cm3·min-1 increases to 29.7 GPa at a deposition temperature of 600 ℃. We propose a growth mechanism for the a-Si1-xCx:H films at room temperature (25 ℃) and at high temperature based on the characterization results.

  • 加载中
    1. [1]

      [1] Tesser, L. R.; Solomom, I. Phys. Rev. B, 1995, 52: 10962

    2. [2]

      [2] Wang, Y.; Yue, R. F.; Li, G. H.; Han, H. X.; Liao, X. B. Appl. Surf. Sci., 2001, 180: 87

    3. [3]

      [3] Yu, W.; Lu, W. B.; Han, L.; Fu, G. S. J. Phys. D-Appl. Phys., 2004, 37: 3304

    4. [4]

      [4] Tsai, H. K.; Lee, S. C. Appl. Phys. Lett., 1988, 52: 275

    5. [5]

      [5] Giorgis, F.; Ambrosone, G.; Coscia, U.; Ferrero, S.; Mandracci, P.; Pirri, C. F. Appl. Surf. Sci., 2001, 184: 204

    6. [6]

      [6] Chu, V.; Conde, J. P.; Jare , J.; Brogueira, P.; Rodriguez, J.; Barradas, N.; Soares, J. C. J. Appl. Phys., 1995, 78: 3164

    7. [7]

      [7] Trusso, S.; Barreca, F.; Neri, F. J. Appl. Phys., 2002, 92: 2485

    8. [8]

      [8] Sha, Z. D.; Wu, X. M.; Zhuge, L. J. Phys. Lett. A, 2005, 346: 186

    9. [9]

      [9] Song, D. Y.; Cho, E. C.; Conibeer, G.; Huang, Y. D.; Flynn, C.; Green, M. A. J. Appl. Phys., 2008, 103: 083544

    10. [10]

      [10] Timmons, A.; Todd, A. D. W.; Mead, S. D.; Carey, G. H.; Sanderson, R. J.; Mar, R. E.; Dahn, J. R. J. Electrochem. Soc., 2007, 154: A865

    11. [11]

      [11] Dimova-Malinovska, D. Vaccum, 2000, 58:183

    12. [12]

      [12] Raja palan, T.; Wang, X.; Lahlouh, B.; Ramkumar, C.; Dutta, P.; Gan padhyay, S. J. Appl. Phys., 2003, 94: 5252

    13. [13]

      [13] Kerdiles, S.; Berthelot, A.; urbilleau, F.; Rizk, R. Appl. Phys. Lett., 2000, 76: 2373

    14. [14]

      [14] Ding, W. Y.; Xu, J.; Li, Y. Q.; Piao, Y.; Gao, P.; Deng, X. L.; Dong, C. Acta Phys. Sin., 2006, 55: 1363 [丁万昱, 徐〓军, 李艳琴, 朴〓勇, 高〓鹏, 邓新绿, 董〓闯. 物理学报, 2006, 55: 1363]

    15. [15]

      [15] Xu, J. MW-ECR plasma enhanced unbalance magnetron sputtering and carbon nitride films preparation [D]. Dalian: Dalian University of Technology, 2002 [徐〓军. 微波-ECR等离子体增强非平衡磁控溅射技术及CN薄膜的制备研究[D]. 大连: 大连理工大学, 2002]

    16. [16]

      [16] Jean, A.; Chaker, M.; Diawara, Y.; Leung, P. K.; Gat, E.; Mercier, P. P.; Pépin, H.; Gujrathi, S.; Ross, G. G.; Kieffer, J. C. J. Appl. Phys., 1992, 72: 3110

    17. [17]

      [17] Mastelaro, V.; Flank, A. M.; Fantini, M. C. A.; Bittencourt, D. R. S.; Carre?觡o, M. N. P.; Pereyra, I. J. Appl. Phys., 1996, 79: 1324

    18. [18]

      [18] Pereyra, I.; Carre?觡o, M. N.; Tabacnicks, M. H.; Prado, R. J.; Fantini, M. C. A. J. Appl. Phys., 1998, 84: 2371

    19. [19]

      [19] Rinnert, H.; Vergnat, M.; Marchal, G.; Burneau, A. Appl. Phys. Lett., 1998, 72: 3157

    20. [20]

      [20] Choi, W. K.; Ong, T. Y.; Tan, L. S.; Loh, F. C.; Tan, K. L. J. Appl. Phys., 1998, 83: 4968

    21. [21]

      [21] Solomon, I.; Schmidt, M. P.; Sénémaud, C.; Khodja, M. D. Phys. Rev. B, 1988, 38: 13263

    22. [22]

      [22] Lee, W. Y. J. Appl. Phys., 1980, 51: 3365

    23. [23]

      [23] Lee, R. C.; Aita, C. R.; Tran, N. C. J. Vac. Sci. Technol. A, 1991, 9: 1351

    24. [24]

      [24] Peng, X. F.; Song, L. X.; Le, J.; Hu, X. F. J. Vac. Sci. Technol. B, 2002, 20: 159

    25. [25]

      [25] Pierson, H. O. Handbook of refractory carbides and nitrides: properties, characteristics, processing and applications. New Jersey, USA: Noyes Publications, 1996: 137-139


  • 加载中
    1. [1]

      Kexin Dong Chuqi Shen Ruyu Yan Yanping Liu Chunqiang Zhuang Shijie Li . Integration of Plasmonic Effect and S-Scheme Heterojunction into Ag/Ag3PO4/C3N5 Photocatalyst for Boosted Photocatalytic Levofloxacin Degradation. Acta Physico-Chimica Sinica, 2024, 40(10): 2310013-. doi: 10.3866/PKU.WHXB202310013

    2. [2]

      Qiying Xia Guokui Liu Yunzhi Li Yaoyao Wei Xia Leng Guangli Zhou Aixiang Wang Congcong Mi Dengxue Ma . Construction and Practice of “Teaching-Learning-Assessment Integration” Model Based on Outcome Orientation: Taking “Structural Chemistry” as an Example. University Chemistry, 2024, 39(10): 361-368. doi: 10.3866/PKU.DXHX202311007

    3. [3]

      Yingran Liang Fei WangJiabao Sun Hongtao Zheng Zhenli Zhu . Construction and Application of a New Experimental Device for Determination of Alkaline Metal Elements by Plasma Atomic Emission Spectrometry Based on Solution Cathode Glow Discharge: An Alternative Approach for Fundamental Teaching Experiments in Emission Spectroscopy. University Chemistry, 2024, 39(5): 380-387. doi: 10.3866/PKU.DXHX202312024

    4. [4]

      Tianqi Bai Kun Huang Fachen Liu Ruochen Shi Wencai Ren Songfeng Pei Peng Gao Zhongfan Liu . 石墨烯厚膜热扩散系数与微观结构的关系. Acta Physico-Chimica Sinica, 2025, 41(3): 2404024-. doi: 10.3866/PKU.WHXB202404024

    5. [5]

      Yan Liu Yuexiang Zhu Luhua Lai . Introduction to Blended and Small-Class Teaching in Structural Chemistry: Exploring the Structure and Properties of Crystals. University Chemistry, 2024, 39(3): 1-4. doi: 10.3866/PKU.DXHX202306084

    6. [6]

      Yingchun ZHANGYiwei SHIRuijie YANGXin WANGZhiguo SONGMin WANG . Dual ligands manganese complexes based on benzene sulfonic acid and 2, 2′-bipyridine: Structure and catalytic properties and mechanism in Mannich reaction. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1501-1510. doi: 10.11862/CJIC.20240078

    7. [7]

      Zhuo Wang Xue Bai Kexin Zhang Hongzhi Wang Jiabao Dong Yuan Gao Bin Zhao . MOF模板法合成氮掺杂碳材料用于增强电化学钠离子储存和去除. Acta Physico-Chimica Sinica, 2025, 41(3): 2405002-. doi: 10.3866/PKU.WHXB202405002

    8. [8]

      Lan Ma Cailu He Ziqi Liu Yaohan Yang Qingxia Ming Xue Luo Tianfeng He Liyun Zhang . Magical Surface Chemistry: Fabrication and Application of Oil-Water Separation Membranes. University Chemistry, 2024, 39(5): 218-227. doi: 10.3866/PKU.DXHX202311046

    9. [9]

      Wen Shi Zhangwen Wei Mei Pan Chengyong Su . Explorations on the Course Construction of Structural Chemistry Practice and Application Targeting the Chemistry “101 Plan”. University Chemistry, 2024, 39(10): 96-100. doi: 10.12461/PKU.DXHX202409036

    10. [10]

      Liyang ZHANGDongdong YANGNing LIYuanyu YANGQi MA . Crystal structures, luminescent properties and Hirshfeld surface analyses of three cadmium(Ⅱ) complexes based on 2-(3-(pyridin-2-yl)-1H-pyrazol-1-yl)benzoate. Chinese Journal of Inorganic Chemistry, 2024, 40(10): 1943-1952. doi: 10.11862/CJIC.20240079

    11. [11]

      Yanxin Wang Hongjuan Wang Yuren Shi Yunxia Yang . Application of Python for Visualizing in Structural Chemistry Teaching. University Chemistry, 2024, 39(3): 108-117. doi: 10.3866/PKU.DXHX202306005

    12. [12]

      Zhiguang Xu Xuan Xu Qiong Luo Ganquan Wang Bin Peng . Reform and Practice of Online and Offline Blended Teaching in Structural Chemistry Course. University Chemistry, 2024, 39(6): 195-200. doi: 10.3866/PKU.DXHX202310112

    13. [13]

      Xuyang Wang Jiapei Zhang Lirui Zhao Xiaowen Xu Guizheng Zou Bin Zhang . Theoretical Study on the Structure and Stability of Copper-Ammonia Coordination Ions. University Chemistry, 2024, 39(3): 384-389. doi: 10.3866/PKU.DXHX202309065

    14. [14]

      Yu Guo Zhiwei Huang Yuqing Hu Junzhe Li Jie Xu . 钠离子电池中铁基异质结构负极材料的最新研究进展. Acta Physico-Chimica Sinica, 2025, 41(3): 2311015-. doi: 10.3866/PKU.WHXB202311015

    15. [15]

      Ronghao Zhao Yifan Liang Mengyao Shi Rongxiu Zhu Dongju Zhang . Investigation into the Mechanism and Migratory Aptitude of Typical Pinacol Rearrangement Reactions: A Research-Oriented Computational Chemistry Experiment. University Chemistry, 2024, 39(4): 305-313. doi: 10.3866/PKU.DXHX202309101

    16. [16]

      Yi Li Zhaoxiang Cao Peng Liu Xia Wu Dongju Zhang . Revealing the Coloration and Color Change Mechanisms of the Eriochrome Black T Indicator through Computational Chemistry and UV-Visible Absorption Spectroscopy. University Chemistry, 2025, 40(3): 132-139. doi: 10.12461/PKU.DXHX202405154

    17. [17]

      Weina Wang Lixia Feng Fengyi Liu Wenliang Wang . Computational Chemistry Experiments in Facilitating the Study of Organic Reaction Mechanism: A Case Study of Electrophilic Addition of HCl to Asymmetric Alkenes. University Chemistry, 2025, 40(3): 206-214. doi: 10.12461/PKU.DXHX202407022

    18. [18]

      Qi Li Pingan Li Zetong Liu Jiahui Zhang Hao Zhang Weilai Yu Xianluo Hu . Fabricating Micro/Nanostructured Separators and Electrode Materials by Coaxial Electrospinning for Lithium-Ion Batteries: From Fundamentals to Applications. Acta Physico-Chimica Sinica, 2024, 40(10): 2311030-. doi: 10.3866/PKU.WHXB202311030

    19. [19]

      Qingfeng Zhang Shang-E Wei Hua Hou Xuan Zhao Zixuan Yang Lin Zhuang . Construction and Reform of the Structural Chemistry Curriculum and Textbooks under the Chemistry “101 Plan”: an In-Depth Exploration for Cultivating Top-Notch Innovative Talents. University Chemistry, 2024, 39(10): 38-44. doi: 10.12461/PKU.DXHX202409047

    20. [20]

      Liang MAHonghua ZHANGWeilu ZHENGAoqi YOUZhiyong OUYANGJunjiang CAO . Construction of highly ordered ZIF-8/Au nanocomposite structure arrays and application of surface-enhanced Raman spectroscopy. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1743-1754. doi: 10.11862/CJIC.20240075

Metrics
  • PDF Downloads(1443)
  • Abstract views(2633)
  • HTML views(2)

通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索
Address:Zhongguancun North First Street 2,100190 Beijing, PR China Tel: +86-010-82449177-888
Powered By info@rhhz.net

/

DownLoad:  Full-Size Img  PowerPoint
Return