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Citation: TANG Li-Dan, GU You-Song, ZHANG Yue, LIU Bang-Wu, YANG Ya, QIN Zi. Fabrication and Li-Related Impurity of ZnO Ceramic Target[J]. Acta Physico-Chimica Sinica, ;2008, 24(09): 1597-1601. doi: 10.3866/PKU.WHXB20080912 shu

Fabrication and Li-Related Impurity of ZnO Ceramic Target

1.
Department of Materials Physics, University of Science and Technology Beijing, Beijing 100083, P. R. China; State Key Laboratory for Advance Metals and Materials, University of Science and Technology Beijing, Beijing 100083, P. R. China

Received Date: 25 February 2008
Available Online: 17 July 2008

Li doping ZnO powders had been synthesized by using carbamide and glycine as fuel and zinc nitrate as oxidant. And then the as-synthesized powders were sintered by spark plasma sintering (SPS). XRD, SEM, and TEM were employed to characterize the microstructure and phase. The results showed that both Li doping ZnO powders and cramic were wurtzite without any other phases, the grain sizes of the powder and ceramic were 0.18-1.7 μm and 1-3 μstudied by XRD analysis. Li element occupied an interstitial site in ZnO powders and a substitutional site in ZnO target, a consequence of the Zn2+ ion being replaced by Li+, which introduced an acceptor level into the crystal. The results showed that the Li doping ZnO ceramic used as sputtering target was beneficial to the preparation of p-type ZnO film.
- Combustion synthesis; Spark plasma sintering; Li-related impurity
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