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Citation: Zhang Da-Heng. Adsorption and Desorption of Oxygen on the Surface of Polycrystalline ZnO Films Deposited by r.f.Sputtering[J]. Acta Physico-Chimica Sinica, ;1995, 11(09): 791-795. doi: 10.3866/PKU.WHXB19950906 shu

Adsorption and Desorption of Oxygen on the Surface of Polycrystalline ZnO Films Deposited by r.f.Sputtering

Zhang Da-Heng

1.
Department of Physics,Shandong University,Jinan 250100

Received Date: 3 September 1994
Available Online: 15 September 1995

Hexa nal ZnO films with the preferred growth orientation of c axis parallel to the substrate have been deposited by r.f. sputtering. An electrical field induced oxygen adsorption was observed on these films. Oxygen adsorption produced by illumination of a UV light or/and reaction with Ar plasma increased the conductivity of the films by 6-7 orders of magnitude and an accumulation layer displayed on the surface of the films.
- ZnO,
- Adsorption,
- Desorption,
- Photodesorption,
- Photoresponse
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