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Citation: YUAN Huan, DU Xiao-Song, XU Ming, ZHANG Chuan-Wu, CHEN Xiang-Dong. Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column[J]. Chinese Journal of Analytical Chemistry, ;2021, 49(5): 686-692. doi: 10.19756/j.issn.0253-3820.201397 shu

Fast Separation on Microelectromechanical System-based Semi-packed Gas Chromatography Wavy Column

1.
Key Laboratory of Electronic and Information Engineering, State Ethnic Affairs Commission, Southwest Minzu University, Chengdu 610041, China;
2.
State Key Laboratory of Electronic Thin Film and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China;
3.
School of Information Science and Technology, Southwest Jiaotong University, Chengdu 611756, China

Corresponding author: YUAN Huan, yuanhuanwill@126.com
Received Date: 8 July 2020
Revised Date: 24 February 2021

Fund Project: Supported by the Fundamental Research Funds for the Central Universities, Southwest Minzu University (No. 2020PTJS19002), the Sichuan Department of Science and Technology (No. 2018JY0338) and the National Natural Science Foundation of China (No.61901401).

A 200-cm-long, 300 μm-depth and 80 μm-wide gas chromatographic (GC) column was fabricated on the silicon chip by microelectromechanical system (MEMS) technique in this work. Unlike the traditional open gas chromatographic column, the design and fabrication of the MEMS-based GC column folded in a wavy configuration which was filled with a circular micro column with a diameter of 30 μm. The size, shape and distribution of the semi-packed column in the prepared micro-chromatographic column were analyzed by finite element analysis software to obtain the optimized preparation parameters. The simulation revealed that MEMS-based semi-packed gas chromatography wavy column achieved an even flow velocity, resulting in a successive improvement of the flow uniformity at the zones between two adjacent bends, as well as a more nonsymmetric distribution at the bends. Benzene and toluene were separated by the fabricated GC column within 1.5 min. In addition, the N-alkane component were separated and the plate number reached 4790 plates/m.
- Microelectromechanical system,
- Microfabricated gas chromatography column,
- Separation efficiency,
- Semi-packed column
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