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Citation: TIAN Bo-Wen, FENG Fei, ZHAO Bin, LUO Fan, YANG Xue-Lei, ZHOU Hai-Mei, LI Xin-Xin. Study of Monolithic Integrated Micro Gas Chromatography Chip[J]. Chinese Journal of Analytical Chemistry, ;2018, 46(9): 1363-1371. doi: 10.11895/j.issn.0253-3820.181027 shu

Study of Monolithic Integrated Micro Gas Chromatography Chip

TIAN Bo-Wen ^1,2, ,
FENG Fei ¹ ,
ZHAO Bin ¹ ,
LUO Fan ^1,2 ,
YANG Xue-Lei ^1,2 ,
ZHOU Hai-Mei ¹ ,
LI Xin-Xin ¹

1.
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Received Date: 12 January 2018
Revised Date: 23 April 2018

Fund Project: This work was supported by the Key Research Program of Frontier Sciences of Chinese Academy of Sciences (No. QYZDJ-SSWJSC001), the Science and Technology Commission of Shanghai Municipality (No. 14DZ1105102), the National Natural Science Foundation of China (Nos.91323304, 61172151, 60876081), and the National High Technology Research and Development Program of China (No. 2009AA04Z317).

A monolithic micro gas chromatography (μGC) chip integrated by a micro separation column (μSC) and a micro thermal conductivity detector (μTCD) was fabricated based on micro-electro-mechanical system (MEMS) technique. Compared with the state of the art, the μSC with high depth-to-width ratio channels, coated with mesoporous silica nanoparticles as stationary phase, could effectively improve the column capacity and separation performance. Besides, the stable suspending μTCD, which was designed and fabricated in two ports of the μGC chip, could availably enhance the thermal isolation and reliability of the device. The mixture of light hydrocarbons (methane, ethane, propane and butane) could be separated by base line and detected by this monolithic integrated μGC chip, in which the overall analysis and detection time was only 33 seconds, the separation resolution of ethane and propane was 8.34, and the number of theoretical plates was as high as 11420. This monolithic integrated μGC chip had the advantages including good separation resolution, high column efficiency and short analysis time, which was highly suitable for portable gas chromatographic field and onsite detection.
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