Citation: FU Liang, SHI Shu-Yun, CHEN Xiao-Qing. Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry[J]. Chinese Journal of Analytical Chemistry, ;2018, 46(1): 107-112. doi: 10.11895/j.issn.0253-3820.171061 shu

Ultra-trace Metal Elements Analysis of High Purity Tetramethylammonium Hydroxide Using Inductively Coupled Plasma Tandem Mass Spectrometry

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Collaborative Innovation Center of Green Development for Wuling Mountain Areas, Yangtze Normal University, Chongqing 408100, China;2 School of Chemistry and Chemical Engineering, Central South University, Changsha 410083, China

Received Date: 3 July 2017
Revised Date: 30 October 2017

Fund Project: This work was supported by the National Natural Science Foundation of China (No. 21275163), the Chongqing Municipal Science and Technology Frontier and the Application of Basic Research Project (No. cstc2015jcyjA10038), and the Scientific and Technological Research Program of Chongqing Municipal Education Commission (No. KJ1601224).

An analytical method was proposed to determine the ultra-trace metal elements in high-purity tetramethylammonium hydroxide (TMAH). A total of 12 kinds of ultra-trace metal elements in 25% (w/w) high-purity TMAH aqueous solution were directly determined after simple dilution with ultrapure water by inductively coupled plasma tandem mass spectrometry (ICP-MS/MS). In MS/MS mode, the spectral interferences were eliminated by the reaction of target ions with O₂ or NH₃/He (1:9, V/V) in the collision/reaction cell (CRC) of the ICP-MS/MS. Cr, Mn, Ni and Mo were determined using the O₂ mass shift method. Cd and Pb were analyzed based on the O₂ on-mass method. Fe, Co, Cu and Zn were determined using the NH₃/He mass shift method. Mg and Al were determined using the NH₃/He on-mass. The detection limits for analytes were in the range of 0.3-57.2 ng/L. The spiked recoveries were in range of 92.0%-106.0%, and the relative standard deviations (RSDs) were less than or equal to 4.6%. The procedure was applied for determining ultra-trace metal elements in 25% high-purity TMAH aqueous solution.
- Tetramethylammonium hydroxide,
- Inductively coupled plasma tandem mass spectrometry,
- Metal elements,
- Mass shift,
- On mass
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沈阳化工大学材料科学与工程学院沈阳 110142