Citation: Xu Yin, Cui-Rong Liu. Synthesis and properties of ionic conduction polymer for anodic bonding[J]. Chinese Chemical Letters, ;2015, 26(3): 289-292. doi: 10.1016/j.cclet.2014.10.027 shu

Synthesis and properties of ionic conduction polymer for anodic bonding

Xu Yin ^, ,
Cui-Rong Liu

1.
Tai Yuan University of Science and Technology, Taiyuan 030024, China

Corresponding author: Xu Yin,
Received Date: 15 August 2014
Available Online: 22 October 2014
Fund Project: This study was supported by the National Natural Science Foundation of China (No. 51275332) (No. 51275332)the Natural Science Foundation for Young Scientists of Shanxi Province, China (No. 2014021025-2). (No. 2014021025-2)

In this study, powders of polyethylene oxide (PEO) and lithiumperchlorate (LiClO₄) were used as the raw materials for producing the ionic conduction polymer PEO-LiClO₄ with different complex-ratios and used for anodic bonding through high energy ball milling method, and meanwhile, X-ray diffraction, differential scanning calorimetry (DSC), ultraviolet absorption spectrum test analysis, and other relevant methods were adopted to research the complexation mechanism of PEO and LiClO₄ and the impact of the ionic conduction polymer with different complex-ratios on the anodic bonding process under the action of the strong static electric field. The research results showed that the crystallization of PEO could be effectively obstructed with increased addition of LiClO₄, thus increasing the content of PEO-LiClO₄ in amorphous area and continuously improving the complexation degree and the room-temperature conductivity thereof, and that the higher room-temperature conductivity enabled PEO-LiClO₄ to better bond with metallic aluminum and have better bonding quality. As the new encapsulatingmaterial, such research results will promote the application of new polymer functional materials in micro-electromechanical system (MEMS) components.
- Packaging,
- Polyethylene oxide,
- Anodic bonding,
- Solid electrolyte
1. [1]
  [1] R. Saha, N. Fritz, S.A. Bidstrup-Allen, P.A. Kohl, Packaging-compatible wafer level capping of MEMS devices, Microelectron. Eng. 104 (2013) 75-84.
2. [2]
  [2] F.L. Zhu, Research on Some Basic Issues of MEMS Packaging Based on Process Mechanics, Huazhong University of Science & Technology, 2007.
3. [3]
  [3] D.M. Zhang, Z.C. Ye, G.P. Ding, Developing trend of bonding technology for MEMS, Electron. Process Technol. 6 (2005) 315-318.
4. [4]
  [4] A.C. Lapadatu, H. Jakobsen, Two-anodic bonding, in: V. Lindroos, M. Tilli (Eds.), Handbook of Silicon Based MEMS Materials and Technologies, 2010, pp. 513-520 (Chapter 30).
5. [5]
  [5] N. Gao, Z.G. Chen, S.T. Wang, X.L. Sui, D.D. Gu, Research on PEI-PEO based solid state polymer electrolyte, J. Harbin Inst. Technol. 43 (2011) 654-659.
6. [6]
  [6] S.T. Ren, H.F. Chang, T. Zheng, et al., HBPS-PEO multi-arm star polymer electrolytes and their ionic conductivity, Acta Polymer Sin. (2013) 1064-1071.
7. [7]
  [7] D.H. Xiong, J.S. Cheng, H. Li, W. Deng, K. Ye, Anodic bonding of glass-ceramics to stainless steel coated with intermediate SiO₂ layer, Microelectron. Eng. 87 (2010) 1741-1746.
8. [8]
  [8] N. Voigt, L. van, Wüllen, The effect of plastic-crystalline succinonitrile on the electrolyte system PEO:LiBF₄: insights from solid state NMR, Solid State Ionics 260 (2014) 65-75.
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