Citation: Lian Yong SU, Jin LUO, Zhong Hua LIN, Zhao Wu TIAN. Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique[J]. Chinese Chemical Letters, ;1996, 7(9): 835-836. shu

Measurement of Concentration Distribution of Electrogenerated Etchant Using an Electrochemical Probe Technique

a National Lab of Molecular and Biomolecular Electronics, Southeast University, Nanjing 210018;
b State Key Lab for Physical Chemistry of Solid Surfaces, Department of Chemistry, Xiamen University 361005

Received Date: 9 January 1996

Fund Project: The project was supported by the National Natural Science Foundation of China.

An electrochemical probe measurement system for detecting an electrogenerated etchant in solution is developed. Concentration distribution of electrogenerated etchant bromine as close as 8 micrometer to the surface of macrodisk is studied quantitatively.
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