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Citation: Cai Kai, Cao Chuanbao, Jiu Jinting, Fu Qiang, Wang Hao, Zhu Hesun. DLC Films Deposited on Conductive Glass in DMF Solution[J]. Chinese Journal of Applied Chemistry, ;1999, 16(4): 80-82. shu

DLC Films Deposited on Conductive Glass in DMF Solution

1.
Research Center of Materials Science, Beijing University of Science and Technology, Beijing 100081

Received Date: 30 November 1998
Available Online: 30 March 1999
Fund Project: 国家自然科学基金资助课题(59882001) (59882001)

The hydrogenated diamond-like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse-modulated source. The X-ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp³ C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330~2000 nm and electrical resistivity of 10¹⁰Ω·cm.
- diamond-like carbon film,
- formation,
- liquid phase deposition,
- spectra characterization
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