Citation: QIN Xiu-Juan, SHAO Guang-Jie, ZHAO Lin. Effect of Substrate Temperature on the AZO Films Grown by AACVD Technique[J]. Chinese Journal of Inorganic Chemistry, ;2013, 29(4): 723-728. doi: 10.3969/j.issn.1001-4861.2013.00.061 shu

Effect of Substrate Temperature on the AZO Films Grown by AACVD Technique

1.
1 Hebei Key Laboratory of Applied Chemistry, Yanshan University, Qinhuangdao, Hebei 066004, China;

Received Date: 25 July 2012
Available Online: 8 October 2012
Fund Project: 河北省自然科学基金(No.B2012203070) (No.B2012203070)河北省教育厅科学研究计划河北省高等学校自然科学研究重点项目(No.ZH2011228)资助项目。 (No.ZH2011228)

Al-doped ZnO thin films (AZO) fabrication technique with low cost, large area, high deposition rate, well uniformity and excellent optical and electrical properties has been one of the most important aims in the transparent conductive oxide films research field. AZO thin films were grown on the glass substrates by cold-wall aerosol-assisted chemical vapour deposition (AACVD) method in this paper. Structural, optical and electrical properties of AZO films grown at different substrate temperature were investigated in detail. The samples were tested by X-Ray Diffraction, Atomic Force Microscopy, UV-Vis and Photoluminescence Spectroscopy. Results indicate that influence of the substrate temperature on the preferred orientation growth of AZO films appears undulant change during the course of AZO film deposited by AACVD. Distinct electrical properties transition takes place at around 400℃. Optical properties and preferred orientation growth of the ZnO films transition take place at around 450℃. Microcosmic mechanism was discussed that the effect of substrate temperature on the structural, optical and electrical properties of AZO films grown by AACVD method. Sheet resistance and the average transmittances in the visible regions of AZO films grown at 400℃ is about 190 Ω/□, 80% respectively.
- aerosol-assisted chemical vapour deposition (AACVD);AZO film;temperature;polar semiconductor;crystalline quality
1. [1]
  [1] JIANG Xin(姜辛), SUN Chao(孙超), HONG Rui-Jiang(洪瑞江), et al. Transparent Conductive Oxide Films(透明导电氧化物薄膜). Beijing: Higher Education Press, 2008:29,182, 282
2. [2]
  [2] Zhao L, Shao G J, Song S T, et al. Rare Metal, 2011,30(2): 175-182
3. [3]
  [3] QIN Xiu-Juan(秦秀娟), HANSI Hui-Zhi(韩司慧智), ZHAO Lin(赵琳), et al. J. Inorg. Mater.(Wuji Cailiao Xuebao), 2011,26(6):607-612
4. [4]
  [4] Zhao L, Qin X J, Shao G J. Chem. Vap. Deposition, 2012,18 (7-9):256-262
5. [5]
  [5] Terasako T, Yamanaka T, Yura S, et al. Thin Solid Films, 2010,519(5):1546-1551
6. [6]
  [6] Illiberi A, Kniknie B, van Deelen J, et al. Sol. Energy Mater. Sol. Cells, 2011,95(7):1955-1959
7. [7]
  [7] Alvern U, Kudret A, Tekerek S. J. Phys. Chem. Solids, 2011, 72(6):701-704
8. [8]
  [8] Gledhill S, Grimm A, Greiner D, et al. Thin Solid Films, 2011,519(13):4293-4298
9. [9]
  [9] Prasada Rao T, Santhoshkumar M C. Appl. Surf. Sci., 2009, 255(16):7212-7215
10. [10]
  [10] Binions R, Claire C, Carmalt J, et al. Thin Solid Films, 2004,469-470:416-419
11. [11]
  [11] Walters G, Parkin I P. Appl. Surf. Sci., 2009,255(13-14): 6555-6560
12. [12]
  [12] Zhao L, Shao G J, Qin X J, et al. J. Alloys Compd., 2011, 509(30):L₂97-L300
13. [13]
  [13] Islam M M, Ishizuka S, Yamada A, et al. Appl. Surf. Sci., 2011,257(9):4026-4030
14. [14]
  [14] Saito K, Watanabe Y, Takahashi K, et al. Sol. Energy Mater. Sol. Cells, 1997,49(1/2/3/4):187-193
15. [15]
  [15] Chakraborty A, Mondal T, Bera S K, et al. Mater. Chem. Phys., 2008,112(1):162-166
16. [16]
  [16] YAO Lian-Zeng(姚连增). Foundation of Crystal Growth(晶体生长基础). Hefei: University of Science and Technology of China Press, 1995:450
17. [17]
  [17] McLachlan M A, Rahman H, Illy B, et al. Mater. Chem. Phys., 2011,129(1-2):343-348
18. [18]
  [18] JI Zhen-Guo(季振国). Semiconductor Physics(半导体物理). Hangzhou: Zhejiang University Press, 2005:54
19. [19]
  [19] Terasako T, Yamanaka T, Yura S, et al. Thin Solid Films, 2010,519(5):1546-1551
20. [20]
  [20] TIAN Xiao-Liang(田晓亮), SUN Wan-Ting(孙婉婷), XIE Ming-Zheng(谢明政), et al. Chinese J. Inorg. Chem.(Wuji Huaxue Xuebao), 2012,28(7):1441-1446a
1. [1]
  Huan LI , Shengyan WANG , Long Zhang , Yue CAO , Xiaohan YANG , Ziliang WANG , Wenjuan ZHU , Wenlei ZHU , Yang ZHOU . Growth mechanisms and application potentials of magic-size clusters of groups Ⅱ-Ⅵ semiconductors. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1425-1441. doi: 10.11862/CJIC.20240088
2. [2]
  Jiao CHEN , Yi LI , Yi XIE , Dandan DIAO , Qiang XIAO . Vapor-phase transport of MFI nanosheets for the fabrication of ultrathin b-axis oriented zeolite membranes. Chinese Journal of Inorganic Chemistry, 2024, 40(3): 507-514. doi: 10.11862/CJIC.20230403
3. [3]
  Yu-Hang Miao , Zheng-Xu Zhang , Xu-Yi Huang , Yuan-Zhao Hua , Shi-Kun Jia , Xiao Xiao , Min-Can Wang , Li-Ping Xu , Guang-Jian Mei . Catalytic asymmetric dearomative azo-Diels–Alder reaction of 2-vinlyindoles. Chinese Chemical Letters, 2024, 35(4): 108830-. doi: 10.1016/j.cclet.2023.108830
4. [4]
  Wendian XIE , Yuehua LONG , Jianyang XIE , Liqun XING , Shixiong SHE , Yan YANG , Zhihao HUANG . Preparation and ion separation performance of oligoether chains enriched covalent organic framework membrane. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1528-1536. doi: 10.11862/CJIC.20240050
5. [5]
  Zhiwen HU , Weixia DONG , Qifu BAO , Ping LI . Low-temperature synthesis of tetragonal BaTiO₃ for piezocatalysis. Chinese Journal of Inorganic Chemistry, 2024, 40(5): 857-866. doi: 10.11862/CJIC.20230462
6. [6]
  Jiahong ZHENG , Jiajun SHEN , Xin BAI . Preparation and electrochemical properties of nickel foam loaded NiMoO₄/NiMoS₄ composites. Chinese Journal of Inorganic Chemistry, 2024, 40(3): 581-590. doi: 10.11862/CJIC.20230253
7. [7]
  Tiantian MA , Sumei LI , Chengyu ZHANG , Lu XU , Yiyan BAI , Yunlong FU , Wenjuan JI , Haiying YANG . Methyl-functionalized Cd-based metal-organic framework for highly sensitive electrochemical sensing of dopamine. Chinese Journal of Inorganic Chemistry, 2024, 40(4): 725-735. doi: 10.11862/CJIC.20230351
8. [8]
  Zhihuan XU , Qing KANG , Yuzhen LONG , Qian YUAN , Cidong LIU , Xin LI , Genghuai TANG , Yuqing LIAO . Effect of graphene oxide concentration on the electrochemical properties of reduced graphene oxide/ZnS. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1329-1336. doi: 10.11862/CJIC.20230447
9. [9]
  Qin ZHU , Jiao MA , Zhihui QIAN , Yuxu LUO , Yujiao GUO , Mingwu XIANG , Xiaofang LIU , Ping NING , Junming GUO . Morphological evolution and electrochemical properties of cathode material LiAl_0.08Mn_1.92O₄ single crystal particles. Chinese Journal of Inorganic Chemistry, 2024, 40(8): 1549-1562. doi: 10.11862/CJIC.20240022
10. [10]
  Qingtang ZHANG , Xiaoyu WU , Zheng WANG , Xiaomei WANG . Performance of nano Li₂FeSiO₄/C cathode material co-doped by potassium and chlorine ions. Chinese Journal of Inorganic Chemistry, 2024, 40(9): 1689-1696. doi: 10.11862/CJIC.20240115
11. [11]
  Lu XU , Chengyu ZHANG , Wenjuan JI , Haiying YANG , Yunlong FU . Zinc metal-organic framework with high-density free carboxyl oxygen functionalized pore walls for targeted electrochemical sensing of paracetamol. Chinese Journal of Inorganic Chemistry, 2024, 40(5): 907-918. doi: 10.11862/CJIC.20230431
12. [12]
  Yuanchao LI , Weifeng HUANG , Pengchao LIANG , Zifang ZHAO , Baoyan XING , Dongliang YAN , Li YANG , Songlin WANG . Effect of heterogeneous dual carbon sources on electrochemical properties of LiMn_0.8Fe_0.2PO₄/C composites. Chinese Journal of Inorganic Chemistry, 2024, 40(4): 751-760. doi: 10.11862/CJIC.20230252
13. [13]
  Xinpeng LIU , Liuyang ZHAO , Hongyi LI , Yatu CHEN , Aimin WU , Aikui LI , Hao HUANG . Ga₂O₃ coated modification and electrochemical performance of Li_1.2Mn_0.54Ni_0.13Co_0.13O₂ cathode material. Chinese Journal of Inorganic Chemistry, 2024, 40(6): 1105-1113. doi: 10.11862/CJIC.20230488
14. [14]
  Jing SU , Bingrong LI , Yiyan BAI , Wenjuan JI , Haiying YANG , Zhefeng Fan . Highly sensitive electrochemical dopamine sensor based on a highly stable In-based metal-organic framework with amino-enriched pores. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1337-1346. doi: 10.11862/CJIC.20230414
15. [15]
  Hongyi LI , Aimin WU , Liuyang ZHAO , Xinpeng LIU , Fengqin CHEN , Aikui LI , Hao HUANG . Effect of Y(PO₃)₃ double-coating modification on the electrochemical properties of Li[Ni_0.8Co_0.15Al_0.05]O₂. Chinese Journal of Inorganic Chemistry, 2024, 40(7): 1320-1328. doi: 10.11862/CJIC.20230480

Get Citation

PDF

XML

Metrics

PDF Downloads(547)
Abstract views(677)
HTML views(47)

通讯作者: 陈斌, bchen63@163.com

1.
沈阳化工大学材料科学与工程学院沈阳 110142