Citation: PAN He, TENG Shu-Hua, DING Cui-Cui. Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface[J]. Acta Physico-Chimica Sinica, ;2012, 28(04): 917-922. doi: 10.3866/PKU.WHXB201201172 shu

Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface

1.
School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu Province, P. R. China

Received Date: 26 September 2011
Available Online: 17 January 2012
Fund Project: 国家重点基础研究发展计划项目(973) (2007CB607605) (973) (2007CB607605)中央高校基本科研业务费专项资金(2011QNA06)资助 (2011QNA06)

Composite films of 3-aminopropyltriethoxysilane (APTES)-SiO₂-APTES were prepared on single-crystal silicon substrates using a self-assembly technique, and then their composition, structure, and tribological properties were characterized. The results showed that the composite films had a uniform and dense surface with an average roughness (R_a) of 0.963 nm and a contact angle of 63°. The atomic force microscopy (AFM) and transmission electron microscopy (TEM) observations revealed that, in the middle layer of the composite film, silica particles of 20-50 nm in diameter were uniformly deposited on the APTES layer. Compared to the APTES self-assembled monolayers (SAMs), the APTES-SiO₂-APTES composite films exhibited a smaller friction coefficient and a longer wear life due to the introduction of the silica nano-particles.
- Single-crystal silicon,
- Self-assembly,
- Composite film,
- Tribological property
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沈阳化工大学材料科学与工程学院沈阳 110142