Citation: SUN Peng, HU Ming, LI Ming-Da, MA Shuang-Yun. Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon[J]. Acta Physico-Chimica Sinica, ;2012, 28(02): 489-493. doi: 10.3866/PKU.WHXB201111212 shu

Microstructure, Electrical and Gas Sensing Properties of Meso-Porous Silicon and Macro-Porous Silicon

1.
School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, P. R. China

Received Date: 13 October 2011
Available Online: 21 November 2011
Fund Project: 国家自然科学基金(60771019) (60771019)天津市应用基础及前沿技术研究计划(11JCZDJC15300)资助项目 (11JCZDJC15300)

Two different kinds of porous silicon (PS) were grown by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon. According to their pore sizes, they were denoted as meso-porous silicon (meso-PS) and macro-porous silicon (macro-PS). The surface and cross-section morphologies of the PS were observed by scanning electron microscope (SEM). The surface chemical bonds of the meso-PS and macro-PS were investigated by Fourier transform infrared (FTIR) spectroscopy. The electrical properties of the PS were studied by measuring the I-V characteristics. The gas sensing properties of meso-PS and macro-PS were thoroughly measured at room temperature. Meso-PS has much higher sensitivity, while macro-PS has better response-recovery characteristics. Meso-PS shows better selectivity for NO₂, while macro-PS shows better selectivity for NH₃.
- Meso-porous silicon,
- Macro-porous silicon,
- Room temperature,
- Gas sensing property
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