Citation: ZHAO Zhi-Juan, LIU Fen, ZHAO Liang-Zhong. XPS Study of the Thickness Nanosize Effect for Ultrathin SiO2 on Si Substrate[J]. Acta Physico-Chimica Sinica, ;2010, 26(11): 3030-3034. doi: 10.3866/PKU.WHXB20101111 shu

XPS Study of the Thickness Nanosize Effect for Ultrathin SiO2 on Si Substrate

  • Received Date: 27 April 2010
    Available Online: 17 September 2010

    Fund Project: 质检公益性行业科研专项项目(200710199)资助 (200710199)

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    沈阳化工大学材料科学与工程学院 沈阳 110142

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