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Citation: Cao Ya-An, Xie Teng-Feng, Zhang Xin-Tong, Guan Zi-Sheng, Ma Ying, Wu Zhi-Yun, Bai Yu-Bai, Li Tie-Jin, Yao Jian-Nian. Investigation on Surface State of TiO₂ Nanoprticulate Film[J]. Acta Physico-Chimica Sinica, ;1999, 15(08): 680-683. doi: 10.3866/PKU.WHXB19990803 shu

Investigation on Surface State of TiO₂ Nanoprticulate Film

1.
Institute of Photographic Chemistry,Chinese Academy of Sciences,Beijing 100101

Received Date: 19 April 1999
Available Online: 15 August 1999

TiO_2 nanoparticulate films were prepared by means of Plasma-enhanced Chemical Vapor Deposition (PECVD). By further surface treatment by TiCl_4 or O_2 plasma, films with different surface properties were obtained. It was found that treatment by TiCl4 plasma enhanced the amount of Ti3+ surface state and Ti dislocation of the film, detected by the surface photovoltage spectroscopy, while O_2 plasma surface treating enhanced its amount of O_2 surface state. It was also indicated by the H_2O adsorption experiment that film treated by O_2 plasma had larger separation efficiency for photogenerated carriers than the one treated by TiCl_4 plasma.
- PECVD,
- TiO2 nanoparticulate film,
- SPS,
- Surface treatment,
- Surface state
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沈阳化工大学材料科学与工程学院沈阳 110142

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通讯作者: 陈斌, bchen63@163.com

Investigation on Surface State of TiO₂ Nanoprticulate Film