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Citation: Cui Jing-Biao, Fang Rong-Chuan. Investigation of Diamond Growth Process by in situ Optical Emission[J]. Acta Physico-Chimica Sinica, ;1996, 12(02): 102-104. doi: 10.3866/PKU.WHXB19960202 shu

Investigation of Diamond Growth Process by in situ Optical Emission

1.
Department of Physics,Structure Research Laboratory,University of Science and Technology of China,Hefei 230026

Received Date: 24 October 1995
Available Online: 15 February 1996

In situ optical emission spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm. The emission lines from atomic hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on emission spectra and diamond nucleation were also investigated. It is found that substrate bias can enhance the nucleation density, which may due to the changes of atomic hydrogen concentration and the increase of electron mean temperature.
- Optical emission spectrum,
- Reaction species,
- Electron assisted hot filament CVD
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