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Citation: Zhang Wei-Ping, Chen Jing, Fang Rong-Chun, Hu Ke-Liang. Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition[J]. Acta Physico-Chimica Sinica, ;1992, 8(03): 383-388. doi: 10.3866/PKU.WHXB19920318 shu

Optical Emission Spectroscopy in Diamond-Like Carbon Film Deposition

1.
Department of Physics, University of science and Technology of China, Hefei 230026

Received Date: 10 February 1991
Available Online: 15 June 1992

We measured the optical emission spectra (OES) of glow discharged plasma of methane in the diamond-like carbon film deposition and analyzed the relationship between the OES and the deposition parameters, such as rf power, gas pressure and the distances from the lower electrode.
The infrared absorption of films were also measured and the results of infrared absorption were compared with that of OES measurement.
- Optical emission spectroscopy; Glow discharge; Diamond-like carbon film
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