Citation: JIN Xing, KONG Jian, WANG Jingqiang, XING Pengfei, GAO Bo. Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste[J]. Chinese Journal of Applied Chemistry, ;2018, 35(11): 1364-1371. doi: 10.11944/j.issn.1000-0518.2018.11.170414 shu

Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

School of Materials Science and Engnieering, Northeastern University, Shenyang 110000, China

Corresponding author: XING Pengfei, xingpf@smm.neu.edu.cn
Received Date: 17 November 2017
Revised Date: 29 December 2017
Accepted Date: 5 February 2018

Fund Project: the National Basic Research Program(973 Program) 51334004Supported by the National Basic Research Program(973 Program)(No.51334004)

Figures(10)

Silicon nitride was prepared through nitriding the diamond-wire cutting waste, which not only recycles the diamond-wire cutting waste but also improves the environment. The influence of HCl and HF on the phase composition, component content and microtopography of nitride products were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS). The results show that the phases in nitride samples fabricated from the HCl-soaked cutting waste are mainly Si₂N₂O and Si₃N₄. However, the phases in nitride samples fabricated from the HF-soaked cutting waste is mostly Si₃N₄. Si₂N₂O in nitride samples is related to the mass fraction of SiO₂ in cutting waste, and the precondition of producing Si₃N₄ from cutting waste by high temperature nitriding is to reduce the mass fraction of SiO₂ in cutting waste.
- diamond-wire cutting waste,
- acid leaching,
- silicon nitride,
- recycle
1. [1]
  HE Jian, XU Zhongmin, SONG Li. Influence on Surface Roughness of Single-Crystal Silicon by Reciprocating Wire Cutting Process[J]. J Mater Sci Eng, 2015,33(5):692-696.
2. [2]
  CAI Erhui, TANG Binbing, ZHOU Lang. Study on the Mode of Diamond Wire Saw Cutting of Crystalline Silicon[J]. J Nanchang Univ, 2011,33(2):194-199. doi: 10.3969/j.issn.1006-0456.2011.02.019
3. [3]
  YANG Chunming. Effect of Size Distribution of SiC Particles on Silicon Crystals Wire Sawing Process[J]. China Powder Sci Technol, 2016,45(1):24-26.
4. [4]
  XING Pengfei, GUO Jing, LIU Yan. Recovery of Slurry Produced in Cutting Mono-/Poly-silicon[J]. J Mater Metall, 2010,9(2):148-153. doi: 10.3969/j.issn.1671-6620.2010.02.016
5. [5]
  XING Pengfei, ZHAO Peiyu, GUO Jing. Recovery of Cutting Slurry Waste of Solar-grade Silicon[J]. Mater Rev, 2011,25(1):75-79.
6. [6]
  Li D G, Xing P F, Zhuang Y X. Recovery of High Purity Silicon from SoG Crystalline Silicon Cutting Slurry Waste[J]. T Nonferr Metal Soc, 2014,24(4):1237-1241. doi: 10.1016/S1003-6326(14)63184-8
7. [7]
  Long M, Li Y, Qin H. Formation Mechanism of Si₃N₄ in Reaction-Bonded Si₃N₄-SiC Composites[J]. Ceram Int, 2016,42(15):16448-16452. doi: 10.1016/j.ceramint.2016.05.118
8. [8]
  XING Pengfei, LIU Yang, KONG Jian, et al. A Method of Recycle Diamond Cutting Waste Slurry: CN, 105523557A[P], 2016-4-27(in Chinese).
9. [9]
  YIN Chuanqiang, LI Bing, WEI Xiuqin. Study on Synthesis of Silicon Oxynitride Powders from Wire Saw Dusts of Silicon[J]. J Synth Cryst, 2015,44(10):2739-2745. doi: 10.3969/j.issn.1000-985X.2015.10.019
10. [10]
  LI Bing, YIN Chuanqiang, WEI Xiuqin. Synthesis of Silicon Oxynitride from Silicon Sawdust and Quartz[J]. J Synth Cryst, 2016,45(4):892-895. doi: 10.3969/j.issn.1000-985X.2016.04.007
11. [11]
  ZHOU Lang, YIN Chuanqiang, WEI Xiuqin. A Method for the Preparetion of Silicon Nitride Through Silicon Sawdust Purified. China patent: CN, 102849695A[P]. 2013-1-2(in Chinese).
12. [12]
  Sousa M D, Vardelle A, Mariaux G. Use of a Thermal Plasma Process to Recycle Silicon Kerf Loss to Solar-Grade Silicon Feedstock[J]. Sep Purif Technol, 2016,161:187-192. doi: 10.1016/j.seppur.2016.02.005
13. [13]
  Vazquezpufleau M, Chadha T S, Yablonsky G. Elimination of Carbon Contamination from Silicon Kerf Using a Furnace Aerosol Reactor Methodology[J]. Ind Eng Chem Res, 2015,54(22):5914-5920. doi: 10.1021/acs.iecr.5b00577
14. [14]
  ZHOU Heping. Introduction to the Method of Quantitative Determination of Phase Content of Si₃N₄ by X-Ray Diffraction Analysis[J]. J Chinese Ceram Soc, 1980(4):94-104.
15. [15]
  Kim M K, Park J K, Lee H W. A Cyclic Process for the Nitridation of Si Powder[J]. Mater Sci Eng A, 2005,408(1):85-91.
16. [16]
  Hyuga H, Zhou Y, Kusano D. Nitridation Behaviors of Silicon Powder Doped with Various Rare Earth Oxides[J]. J Ceram Soc Jpn, 2011,119(1387):251-253. doi: 10.2109/jcersj2.119.251
17. [17]
  Dai K, Adachi S, Tanabe G. Effects of Impurity Oxygen Content in Raw Si Powder on Thermal and Mechanical Properties of Sintered Reaction-Bonded Silicon Nitrides[J]. Int J Appl Ceram Technol, 2012,9(2):229-238. doi: 10.1111/ijac.2012.9.issue-2
18. [18]
  Wu Y, Cui Y, Lynn H. Controlled Growth and Structures of Molecular-Scale Silicon Nanowires[J]. Nano Lett, 2004,4(3):433-436. doi: 10.1021/nl035162i
19. [19]
  Pan Z, Dai Z, Xu L. Temperature-Controlled Growth of Silicon Based Naostructures by Thermal Evaporation[J]. J Phys Chem B, 2001,105:2507-2514. doi: 10.1021/jp004253q
20. [20]
  Barsoum M, Kangutkar P, Koczak M J. Nitridation Kinetics and Thermodynamics of Silicon Powder Compacts[J]. J Am Ceram Soc, 1991,74(6):1248-1253. doi: 10.1111/jace.1991.74.issue-6
21. [21]
  Giridhar R V. Conditions for Thermal Nitridation of Si in N₂-O₂ Mixtures[J]. J Electrochem Soc, 1988,135(11):2803-2807. doi: 10.1149/1.2095436
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