Citation: JIN Xing, KONG Jian, WANG Jingqiang, XING Pengfei, GAO Bo. Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste[J]. Chinese Journal of Applied Chemistry, ;2018, 35(11): 1364-1371. doi: 10.11944/j.issn.1000-0518.2018.11.170414 shu

Preparation of High-Purity Silicon Nitride from Diamond-Wire Cutting Waste

School of Materials Science and Engnieering, Northeastern University, Shenyang 110000, China

Corresponding author: XING Pengfei, xingpf@smm.neu.edu.cn
Received Date: 17 November 2017
Revised Date: 29 December 2017
Accepted Date: 5 February 2018

Fund Project: the National Basic Research Program(973 Program) 51334004Supported by the National Basic Research Program(973 Program)(No.51334004)

Figures(10)

Silicon nitride was prepared through nitriding the diamond-wire cutting waste, which not only recycles the diamond-wire cutting waste but also improves the environment. The influence of HCl and HF on the phase composition, component content and microtopography of nitride products were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS). The results show that the phases in nitride samples fabricated from the HCl-soaked cutting waste are mainly Si₂N₂O and Si₃N₄. However, the phases in nitride samples fabricated from the HF-soaked cutting waste is mostly Si₃N₄. Si₂N₂O in nitride samples is related to the mass fraction of SiO₂ in cutting waste, and the precondition of producing Si₃N₄ from cutting waste by high temperature nitriding is to reduce the mass fraction of SiO₂ in cutting waste.
- diamond-wire cutting waste,
- acid leaching,
- silicon nitride,
- recycle
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