Citation: SUN Lan-Xiang, WANG Wei, TIAN Xue-Yong, ZHANG Peng, QI Li-Feng, ZHENG Li-Ming. Progress in Research and Application of Micro-laser-induced Breakdown Spectroscopy[J]. Chinese Journal of Analytical Chemistry, ;2018, 46(10): 1518-1527. doi: 10.11895/j.issn.0253-3820.181150
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The technique of micro-laser-induced breakdown spectroscopy usually refers to analyzing the surface of the sample using a compact focused laser beam in the optical microscope range. Compared to macro-laser-induced breakdown spectroscopy, it can provide more abundant form, structure, and content information in a smaller, less sample condition. Hence, the application field is very wide. In this paper, the basic status of micro-laser-induced breakdown spectroscopy in the selection of laser source and the structure of optical path system were introduced, and its application in metal, semiconductor, animal and plant fields was reviewed. The existing issues and potential development direction were also pointed out.
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