Citation: WU Shi-Tou, WANG Ya-Ping, XU Chun-Xue, YUAN Ji-Hai. Elemental Fractionation Studies of 193 nm ArF Excimer Laser Ablation System at High Space Resolution Mode[J]. Chinese Journal of Analytical Chemistry, ;2016, 44(7): 1035-1041. doi: 10.11895/j.issn.0253-3820.151006
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Limits of detection (LODs), ICP mass load effect, downhole induced fractionation and matrix effect of 193 nm ArF excimer laser ablation system at high spatial resolution were systematically investigated. Trace elements in GSD-1G, StHs6/80-G and NIST612 were analyzed at 10 μm spot size. The results showed that LODs decreased with increasing ablation diameter. LODs of some trace elements were in a range of 1-10μg/g at 7 μm spot size. Mass load effect was negatively correlated with corresponding oxide melting temperature, while positively correlated with elemental 1st ionization potential. Downhole fractionation was negligible when the ratio of ablation depth versus spot size was smaller than 1:1. Matrix effect based on elemental pair method showed that there was no significant change between spot sizes of 50 μm and 10 μm among investigated reference materials (NIST610, GSD-1G, ATHO-G and StHs6/80-G). Based on NIST610 as external standard and Ca as internal standard, the analytical results of 36 trace elements in GSD-1G, StHs6/80-G and NIST612 at 10μm spot size matched well with the reference value. In general, 10 μm spatial resolution could satisfy the requirements of trace element analysis.
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