Citation: Yue WANG, Xian-Zhen LI, Yu-Jie LAI, Zheng NIU. Zirconium-based metal-organic framework for tetramethylsilane/isopentane separation[J]. Chinese Journal of Inorganic Chemistry, ;2023, 39(10): 1841-1847. doi: 10.11862/CJIC.2023.163 shu

Zirconium-based metal-organic framework for tetramethylsilane/isopentane separation

College of Chemistry, Chemical Engineering and Materials Science, Soochow University, Suzhou, Jiangsu 215123, China

Corresponding author: Zheng NIU, zhengniu@suda.edu.cn
Received Date: 7 May 2023
Revised Date: 16 June 2023

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In the semiconductor industry, efficient capture of isopentane from tetramethylsilane (TMS)/isopentane mixtures is very important. Herein, we chose MOF-801 with cages to achieve the separation of isopentane from TMS by using the difference in their adsorption capacity for TMS and isopentane. The gas adsorption test results showed that the isopentane uptake amount of MOF-801 was 2.56 mmol·g^-1 and the TMS was 1.20 mmol·g^-1 at 298 K and 60 kPa. Ideal adsorption solution theory (IAST) calculations showed that its separation selectivity for the TMS/isopentane (95:5, volume ratio) mixture was 105.8. The great separation performance of MOF-801 was further verified by the liquid-phase adsorption separation experiments, and the purity of the obtained TMS was greater than 99.98% (volume fraction).
- metal-organic frameworks,
- TMS/isopentane separation,
- electronic specialty gas,
- MOF-801
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