Citation:
YE Mu, CHEN Jie, LU Lizhen, CHEN Chuanzheng, YUE Jin. POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*[J]. Chinese Journal of Polymer Science,
1985, 3(4): 305-312.
POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*
摘要:
In a capacitively coupled discharge with external electrodes, He, H2, N2 or Ar were used as plasmagas, polymerization of octafluorocyclobutane was carried out under different conditions by varyingdischarge power, pressure, plasma gas and plasma-gas/monomer ratio. Structure of polymerizedproducts was characterized by IR spectroscopy and ESCA measurement. It was found that therewere six elements in the products, i.e. C, F, Si, O, N and H. The probably existed groups in poly-mers wer investigated. By analyzing the resolved peaks of C1S region in ESCA spectra,effect of the reaction conditions on degree of branching of the polymerized products and the relationship of the polymer structure with the mechanism of the competitive ablation and polymerization process were studied.In addition,polymer deposition process occurring in glow discharge was discussed.
English
POLYMERIZATION OF OCTAFLUOROCYCLOBUTANE IN GLOW DISCHARGE Ⅱ. ESCA AND IR CHARACTERIZATION OF POLYMER STRUCTURE*
Abstract:
In a capacitively coupled discharge with external electrodes, He, H2, N2 or Ar were used as plasmagas, polymerization of octafluorocyclobutane was carried out under different conditions by varyingdischarge power, pressure, plasma gas and plasma-gas/monomer ratio. Structure of polymerizedproducts was characterized by IR spectroscopy and ESCA measurement. It was found that therewere six elements in the products, i.e. C, F, Si, O, N and H. The probably existed groups in poly-mers wer investigated. By analyzing the resolved peaks of C1S region in ESCA spectra,effect of the reaction conditions on degree of branching of the polymerized products and the relationship of the polymer structure with the mechanism of the competitive ablation and polymerization process were studied.In addition,polymer deposition process occurring in glow discharge was discussed.
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