Citation: LI Lei, ZHONG Ya-Wen, CHEN Cai-Kang, LI Jian. A Novel Path to Patterning Based on the Static Breath Figure Technique[J]. Acta Physico-Chimica Sinica, 2010, 26(04): 1135-1142. doi: 10.3866/PKU.WHXB20100424
基于静态呼吸图技术的图案化方法
English
A Novel Path to Patterning Based on the Static Breath Figure Technique
The breath figure technique is one of the most promising strategies for the fabrication of large-sized patterns containing an ordered two-dimensional array of holes. In this review, particular emphasis is placed on the static breath figure technique, which is a robust methodology suitable for various polymers including linear polystyrene (PS), amphiphilic diblock copolymers and polymer/inorganic precursor hybrid films. The resultant highly ordered microporous polymer films can be used as a mask for lithography. Moreover, the microporous polymer films can be surface modified and cross-linked by UV irradiation. The surface modified films can potentially be applied as a cell scaffold and the cross-linked polymer/hybrid films can be used as templates for the growth of nanomaterial arrays.
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Key words:
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Static breath figure
- / Block copolymer
- / Patterning
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