Citation: QU Shao-Hua, JIA Li-Hui. Mechanical Properties of Si/DLC Films on Au and Au-Cu Substrates[J]. Acta Physico-Chimica Sinica, 2009, 25(11): 2391-2394. doi: 10.3866/PKU.WHXB20091124
以Au和Au-Cu为衬底的Si/DLC薄膜的机械性能
通过纳米划痕测试技术(nano-scratch)研究了以Au和Au-Cu(xAu=93%, xCu=7%)为衬底, 多晶硅Si为基片的类金刚石(DLC)薄膜的机械性能, 其中DLC薄膜厚度约为10 nm. 研究结果表明, Au-Cu衬底对Si/DLC薄膜的结合力比Au衬底对Si/DLC薄膜的结合力要好. 紫外(244 nm)为激发光源的拉曼光谱测试结果显示在相同薄膜制备条件下Au-Cu衬底比Au衬底含有更多的sp3成分, 同时也意味着以Au-Cu为衬底的Si/DLC薄膜具有更高的硬度和密度. 通过对研究结果的分析讨论可以得出, 由于具有较好的结合力和高硬度, Au-Cu是磁记录磁头保护膜Si/DLC薄膜的更好lead材料.
English
Mechanical Properties of Si/DLC Films on Au and Au-Cu Substrates
The mechanical properties of Si/DLC (diamond-like carbon, around 10 nm) films on Au and Au-Cu (xAu=93%, xCu=7%) substrates were studied by nanoscratch tests. Results show that Au-Cu exhibits better adhesion to Si/DLC than Au does to Si/DLC. Ultraviolet (244 nm) Raman spectra show that DLC films on Au-Cu contain more sp3 character than those on Au using the same batch coating process. This indicates greater hardness and higher density of the films on Au-Cu. The implications of these results on the mechanisms proposed for film formation are discussed. Au-Cu is thus a better candidate for use as a lead material in Si/DLC coatings because of its better adhesion and greater hardness for magnetic recording sliders.
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Key words:
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Raman spectroscopy
- / Diamond-like carbon film
- / Adhesion
- / Hardness
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