引用本文:
崔景彪, 方容川. 金刚石膜生长过程原位光发射谱研究[J]. 物理化学学报,
1996, 12(02): 102-104.
doi:
10.3866/PKU.WHXB19960202
Citation: Cui Jing-Biao, Fang Rong-Chuan. Investigation of Diamond Growth Process by in situ Optical Emission[J]. Acta Physico-Chimica Sinica, 1996, 12(02): 102-104. doi: 10.3866/PKU.WHXB19960202
Citation: Cui Jing-Biao, Fang Rong-Chuan. Investigation of Diamond Growth Process by in situ Optical Emission[J]. Acta Physico-Chimica Sinica, 1996, 12(02): 102-104. doi: 10.3866/PKU.WHXB19960202
金刚石膜生长过程原位光发射谱研究
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关键词:
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光发射谱
- / 反应基团
- / 电子增强热灯丝CVD
English
Investigation of Diamond Growth Process by in situ Optical Emission
Abstract:
In situ optical emission spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm. The emission lines from atomic hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on emission spectra and diamond nucleation were also investigated. It is found that substrate bias can enhance the nucleation density, which may due to the changes of atomic hydrogen concentration and the increase of electron mean temperature.
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