引用本文:
Yong ZHANG, Kun Lin ZHOU, Wei Min CAO, Wei Min LIU. PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION[J]. Chinese Chemical Letters,
1996, 7(5): 493-494.
Citation: Yong ZHANG, Kun Lin ZHOU, Wei Min CAO, Wei Min LIU. PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION[J]. Chinese Chemical Letters, 1996, 7(5): 493-494.
Citation: Yong ZHANG, Kun Lin ZHOU, Wei Min CAO, Wei Min LIU. PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION[J]. Chinese Chemical Letters, 1996, 7(5): 493-494.
PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION
摘要:
Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow dis charge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated.The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200℃.
English
PROPERTIES OF ULTRAFINE SnOx THIN FILM MADE BY PLASMA POLYMERIZATION
Abstract:
Ultrafine SnOx thin films were prepared from tetrabutyltin by RF glow dis charge polymerization. Annealing behaviour of films under air and gas-sensitive property were investigated.The ultrafine SnOx thin film with average particle size of 6nm exhibited a high sensitivity of 30 to 500ppm EtOH at 200℃.
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