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Citation: YANG Ning-Ning, YA Jing, HU Feng-Jiao, GUO Xiao-Lin. Effects of Different Substrates on the Optical Properties of TiO2 and SiO2 Films[J]. Chinese Journal of Inorganic Chemistry, ;2015, 31(7): 1315-1320. doi: 10.11862/CJIC.2015.199 shu

Effects of Different Substrates on the Optical Properties of TiO2 and SiO2 Films

  • 1.

    Tianjin Chengjian University, School of Materials Science and Engineering, Tianjin 300384, China

  • Corresponding author: YA Jing, 
  • Received Date: 20 November 2014
    Available Online: 24 April 2015

    Fund Project: 天津市薄膜光学重点实验室开放基金(No.JHWX130492)资助项目。 (No.JHWX130492)

  • TiO2 and SiO2 thin films were respectively deposited on K9 glass, monocrystalline silicon and quartz glass substrates by using the sol-gel method. The surface morphology and optical properties of the films were characterized by SEM, UV-Vis and spectroscopic ellipsometer. Among the three substrates, on the monocrystalline silicon substrate TiO2 and SiO2 thin films have the largest refractive index; On the amorphous K9 glass and quartz glass substrate, refractive index and light transmittance of TiO2 film are quite different; On the amorphous substrate, refractive index and light transmittance of SiO2 are similar; SiO2 and TiO2 film have a law that with increased the number of wavelength, the refractive index and extinction coefficient reduced; Cauchy model could describe optical properties of films very on the silicon substrate well in 300~700 nm waveband.
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